{"id":"W2168552217","doi":"10.1109/icmens.2003.1221996","title":"MEMS 3D optical mirror/scanner","year":2004,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":5,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta; Micralyne","funders":"","keywords":"Optics; Microelectromechanical systems; Comb drive; Fabrication; Materials science; Tilt (camera); Actuator; Radius of curvature; Plane mirror; Surface roughness; Stiction; Rotation (mathematics); Curvature; Optoelectronics; Physics; Electrical engineering; Engineering; Computer science","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001413541,0.0002172215,0.0002913895,0.0001972811,0.0002318822,0.0003316619,0.0005093482,0.000625305,0.004979777],"category_scores_gemma":[0.0002056289,0.0002300968,0.0004272262,0.000137583,0.0002083538,0.0003427388,0.0005283935,0.0003255693,0.001287435],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002779732,"about_ca_system_score_gemma":0.0002999848,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004668579,"about_ca_topic_score_gemma":0.001206347,"domain_scores_codex":[0.9997426,0.00002217749,0.00001131121,0.0000367845,0.0001656818,0.00002143494],"domain_scores_gemma":[0.999885,0.00002856806,0.00001853326,0.00003060074,0.00002855281,0.000008820144],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001414052,0.00004152736,0.001301243,0.0002578688,0.00004804555,0.0005839433,0.0001079646,0.005640711,0.8485653,0.01257862,0.007635066,0.1230983],"study_design_scores_gemma":[0.000118513,0.0004753787,0.006962766,0.00005188296,0.00006121772,0.00579513,0.00008053982,0.1279999,0.6760798,0.002890904,0.1793393,0.0001448583],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.2652518,0.002458706,0.6527442,0.001114176,0.001024451,0.0003224676,0.001850599,0.007128485,0.068105],"genre_scores_gemma":[0.4956445,0.0006130099,0.4840595,0.0003633168,0.0001068203,0.0001864576,0.0006391098,0.0001623371,0.01822487],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.004979777,"threshold_uncertainty_score":0.01665908,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008786771191994076,"score_gpt":0.2151016889544715,"score_spread":0.2063149177624775,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}