{"id":"W2168552217","doi":"10.1109/icmens.2003.1221996","title":"MEMS 3D optical mirror/scanner","year":2004,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":5,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta; Micralyne","funders":"","keywords":"Optics; Microelectromechanical systems; Comb drive; Fabrication; Materials science; Tilt (camera); Actuator; Radius of curvature; Plane mirror; Surface roughness; Stiction; Rotation (mathematics); Curvature; Optoelectronics; Physics; Electrical engineering; Engineering; Computer science","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00001525577,0.00007720532,0.00007622414,0.00003214058,0.00001861972,0.000007487135,0.00007826,0.00007076235,0.00006646143],"category_scores_gemma":[0.00001156964,0.00006240073,0.00002251874,0.00007696092,0.00003230289,0.00007172862,0.00002059544,0.0001000375,0.0001528079],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0000345217,"about_ca_system_score_gemma":0.000003660608,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001398676,"about_ca_topic_score_gemma":0.00003775547,"domain_scores_codex":[0.9996161,1.660131e-7,0.00007348603,0.00008093621,0.00005443317,0.0001748445],"domain_scores_gemma":[0.9998064,0.000006973671,0.000003418112,0.0001424193,0.000007575943,0.00003318303],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00000357548,0.00003863825,0.00001678745,0.00002851004,0.00003370262,0.00004968835,0.00007364086,0.01532108,0.8815643,0.05679676,0.001376898,0.04469638],"study_design_scores_gemma":[0.0004115035,0.00004161744,0.000463952,0.00001540798,0.000005392111,0.00001897996,0.0001107875,0.0001959919,0.9313753,0.01335871,0.05373675,0.000265545],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.844594,0.0003019574,0.03668666,0.0004594552,0.0003516712,0.00009882111,0.00000145258,0.003666149,0.1138398],"genre_scores_gemma":[0.9098459,0.00008576801,0.08940927,0.00004529919,0.00001954281,0.00001058655,9.043579e-7,0.0000192575,0.0005635099],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1132763,"threshold_uncertainty_score":0.2544628,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008786771191994076,"score_gpt":0.2151016889544715,"score_spread":0.2063149177624775,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}