{"id":"W2169473587","doi":"10.1116/1.1515800","title":"Spatial survey of a magnetron plasma sputtering system using a Langmuir probe","year":2002,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"Metal and Thin Film Mechanics","field":"Engineering","cited_by":59,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"","keywords":"Langmuir probe; Plasma; Atomic physics; Electron; Electron temperature; Electron density; Cathode; Spatial distribution; Plasma diagnostics; Physics; Chemistry; Nuclear physics; Geology","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.001206879,0.0002066584,0.0005088472,0.000772923,0.0001401118,0.00005217458,0.0005359712,0.00019407,0.00003830695],"category_scores_gemma":[0.00006570111,0.0001668763,0.00006442555,0.001312386,0.0002763228,0.0003580395,0.0001517107,0.0003962377,0.000004802501],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000062065,"about_ca_system_score_gemma":0.00004084874,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00007637034,"about_ca_topic_score_gemma":0.00002138612,"domain_scores_codex":[0.9983256,0.00003285241,0.0006267476,0.0002090718,0.0003956271,0.0004100286],"domain_scores_gemma":[0.9990829,0.00003136176,0.0003216248,0.0002289196,0.0002196717,0.0001154872],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.00003858288,0.0000939553,0.02448511,0.0004121618,0.00009626805,0.00009873779,0.000428888,0.001840745,0.9666575,0.001048149,0.0001261469,0.004673795],"study_design_scores_gemma":[0.0007791859,0.0006554184,0.01119607,0.0003922218,0.00006764878,0.001254002,0.0005523853,0.8804483,0.1038917,0.0001781335,0.0002158279,0.0003691028],"study_design_candidate":"bench_or_experimental","study_design_consensus":null,"genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9926601,0.001861526,0.004019302,0.00004761492,0.001069812,0.0001123367,0.00001862058,0.00009503131,0.0001156464],"genre_scores_gemma":[0.9908133,0.0001947575,0.008902268,0.000003825724,0.00002242053,0.000001355667,3.249741e-7,0.00001891246,0.00004288382],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.8786075,"threshold_uncertainty_score":0.6805018,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0234182188320106,"score_gpt":0.2140312860226035,"score_spread":0.190613067190593,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}