{"id":"W2170019003","doi":"10.1016/j.mee.2009.09.004","title":"Silicon nanostencils with integrated support structures","year":2009,"lang":"en","type":"article","venue":"Microelectronic Engineering","topic":"Nanofabrication and Lithography Techniques","field":"Engineering","cited_by":10,"is_retracted":false,"has_abstract":false,"ca_institutions":"Université de Sherbrooke; McGill University","funders":"","keywords":"Materials science; Microfabrication; Fabrication; Stencil; Silicon; Membrane; Deflection (physics); Composite material; Resist; Tantalum; Stiffening; Nanotechnology; Optics; Optoelectronics; Layer (electronics); Metallurgy; Chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00004904393,0.0002402459,0.0001851261,0.0002211486,0.00002999902,0.00004053213,0.0001751941,0.00008460807,0.0000608009],"category_scores_gemma":[0.000005273745,0.0002117811,0.00005734991,0.0004815636,0.00001257565,0.0001136681,0.000004942621,0.000273715,0.000007245677],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001263251,"about_ca_system_score_gemma":0.00003416398,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000004188478,"about_ca_topic_score_gemma":0.000003361516,"domain_scores_codex":[0.9990626,0.000005671505,0.0001839994,0.0001812654,0.0001093773,0.0004570597],"domain_scores_gemma":[0.9996219,0.00001085681,0.00001862599,0.0002334709,0.00003765858,0.00007749808],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000009418762,0.0000134908,0.00004668155,0.00002916305,0.00004956304,0.00001198246,0.000108841,0.005319783,0.9581265,0.003297567,0.001029875,0.03195706],"study_design_scores_gemma":[0.0003412998,0.0003070436,0.001560992,0.00003743299,0.00002296521,0.0001521843,0.0000179165,0.004762371,0.9103209,0.0001382033,0.08183084,0.0005078802],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7352927,0.005410422,0.2399553,0.0002495546,0.0002496828,0.0008668815,0.00002206993,0.01013006,0.007823343],"genre_scores_gemma":[0.9938722,0.0001141558,0.005756177,0.00006418803,0.00003616931,0.00001678381,0.00002648308,0.0000399431,0.00007388986],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.2585795,"threshold_uncertainty_score":0.8636183,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.002361603266752288,"score_gpt":0.1713033602804583,"score_spread":0.1689417570137061,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}