{"id":"W2177687796","doi":"10.1149/05004.0075ecst","title":"Correlation between Electrical and Optical Properties of Tantalum Anodic Oxide and Electron Cyclotron Resonance Etching Studies of E-beam Deposited Ta<sub>2</sub>O<sub>5</sub> Films","year":2013,"lang":"en","type":"article","venue":"ECS Transactions","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of British Columbia","funders":"","keywords":"Tantalum; Electron cyclotron resonance; Ellipsometry; Materials science; Etching (microfabrication); Analytical Chemistry (journal); Cathode ray; Electron; Electrolyte; Optics; Thin film; Chemistry; Electrode; Nanotechnology; Physics; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001074036,0.0001331747,0.00009165826,0.0002543608,0.00008148504,0.0002043186,0.0001508461,0.0002102564,0.00111632],"category_scores_gemma":[0.0003787522,0.0001267548,0.0001030659,0.0002755372,0.0001159946,0.0001680399,0.00005778165,0.0001569672,0.0001586093],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001028031,"about_ca_system_score_gemma":0.00005653685,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005095847,"about_ca_topic_score_gemma":0.0008853421,"domain_scores_codex":[0.9999142,0.000008239635,0.000007463907,0.00001850579,0.00003349522,0.00001811782],"domain_scores_gemma":[0.9997687,0.00008709265,0.00005002593,0.00001518251,0.00006261268,0.00001645665],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004623855,0.000008765656,0.002718362,0.00002397029,0.00000799964,0.00004623286,0.00002249877,0.00008572017,0.9950413,0.00002912815,0.00001983035,0.001949997],"study_design_scores_gemma":[0.000005294121,0.0001686969,0.09659177,0.000004887734,0.00002589105,0.0002195735,0.0001170614,0.001524449,0.9005954,0.00003253953,0.0007085669,0.00000584257],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9982632,0.0002648591,0.0006390266,0.00001179164,0.000003107805,0.000002846522,0.00009411294,0.00001282521,0.0007083283],"genre_scores_gemma":[0.9986801,0.000157348,0.0005564396,0.000007989152,0.000001802661,0.000003217699,0.0001675381,0.000003985002,0.0004217386],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.00111632,"threshold_uncertainty_score":0.00373441,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0128504429185039,"score_gpt":0.2135424443831912,"score_spread":0.2006920014646873,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}