{"id":"W2182773255","doi":"10.1116/1.4936885","title":"Selective dry etching of TiN nanostructures over SiO2 nanotrenches using a Cl2/Ar/N2 inductively coupled plasma","year":2015,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":5,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut interdisciplinaire d'innovation technologique; Université de Sherbrooke","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Tin; Materials science; Inductively coupled plasma; Volumetric flow rate; Nanostructure; Etching (microfabrication); Dry etching; Analytical Chemistry (journal); Deposition (geology); Plasma; Layer (electronics); Fabrication; Biasing; Nanotechnology; Optoelectronics; Metallurgy; Voltage; Chemistry; Chromatography","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.001911345,0.0003523782,0.0007558794,0.001326581,0.0002813253,0.000130513,0.0005055757,0.0004510499,0.000005163674],"category_scores_gemma":[0.0002097273,0.0002924728,0.00003474239,0.001051911,0.001046454,0.0006254683,0.0001642938,0.0004505899,3.157615e-7],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003372187,"about_ca_system_score_gemma":0.000758411,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001485391,"about_ca_topic_score_gemma":0.000009987869,"domain_scores_codex":[0.9977155,0.00004436222,0.0008061723,0.0003665118,0.0004383261,0.0006290955],"domain_scores_gemma":[0.9982733,0.00001978442,0.0007225627,0.0001853477,0.0006967806,0.000102226],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001143276,0.00003369147,0.0003832533,0.0001405227,0.00007319696,0.000003374401,0.000642074,0.00005407348,0.9947212,0.0004571715,0.000006295092,0.003370811],"study_design_scores_gemma":[0.001038749,0.000482193,0.0002041657,0.0002637255,0.00009214684,0.000243426,0.0006578512,0.0004636696,0.9858429,0.01029524,0.0001201623,0.0002957965],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.987014,0.01163178,0.0003968215,0.0001085908,0.0005230578,0.0001803048,0.000005726267,0.0001248201,0.00001487642],"genre_scores_gemma":[0.9965804,0.0004561549,0.002847266,0.00001758186,0.00006083509,0.000005285958,5.892789e-7,0.00003013898,0.000001729562],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.01117563,"threshold_uncertainty_score":0.9999527,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02308355433671133,"score_gpt":0.2379407850247322,"score_spread":0.2148572306880209,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}