{"id":"W2187650500","doi":"","title":"EOT Measurement for Ultra-Thin gate Dielectrics using LC Resonance Circuit","year":2005,"lang":"en","type":"article","venue":"International Conference on Microelectronic Test Structures","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Hatch (Canada)","funders":"","keywords":"Materials science; Optoelectronics; Gate dielectric; Dielectric; Resonance (particle physics); Equivalent circuit; LC circuit; Leakage (economics); Inductance; Logic gate; High-κ dielectric; Voltage; Electrical engineering; Capacitor; Transistor; Engineering; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002602301,0.0002855847,0.0002235468,0.0003985868,0.0001779651,0.000315695,0.0003278614,0.0003872651,0.0008580479],"category_scores_gemma":[0.0007985982,0.0001328064,0.0001009912,0.0002847223,0.0002941974,0.0007846428,0.0004393659,0.0004206945,0.0002341961],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002998018,"about_ca_system_score_gemma":0.0001041563,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002537332,"about_ca_topic_score_gemma":0.0002628498,"domain_scores_codex":[0.9997966,0.00001690761,0.000009734498,0.00003867018,0.0001195468,0.00001855775],"domain_scores_gemma":[0.9996203,0.0001310533,0.00007110358,0.00004279236,0.0001155046,0.00001920188],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00008061006,0.00001523361,0.0004378071,0.00005766212,0.000005034987,0.00009984399,0.00005082936,0.0003611299,0.9852695,0.0005278756,0.000227586,0.01286695],"study_design_scores_gemma":[0.00001102701,0.0001389718,0.001609851,0.000008729522,0.00001047301,0.0003655428,0.00003200493,0.009546828,0.9859022,0.0003189166,0.002038879,0.00001654349],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8002461,0.001159274,0.1890317,0.0003154168,0.000204583,0.00008096133,0.0003638734,0.001191448,0.007406558],"genre_scores_gemma":[0.963648,0.0003917496,0.03390285,0.0001135736,0.00003646558,0.00003574243,0.0001187353,0.00006364805,0.001689253],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0008580479,"threshold_uncertainty_score":0.00287044,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.06400091033274273,"score_gpt":0.2793792216425137,"score_spread":0.2153783113097709,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}