{"id":"W2192899966","doi":"10.1149/ma2010-02/27/1750","title":"Characterization of Sequentially Plasma Activated Silicon, Silicon Dioxide and Germanium Surfaces and Bonded Interfaces for Low Temperature Applications","year":2010,"lang":"en","type":"article","venue":"ECS Meeting Abstracts","topic":"3D IC and TSV technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"McMaster University","funders":"","keywords":"Silicon; Silicon dioxide; Germanium; Materials science; Characterization (materials science); Plasma; Optoelectronics; Nanotechnology; Chemical engineering; Composite material; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000131136,0.0003208169,0.0001897545,0.0002572705,0.0002382303,0.0002583968,0.0003313292,0.0003974019,0.00234793],"category_scores_gemma":[0.0003636277,0.0001903797,0.0001900565,0.0001660106,0.0001717724,0.0002326148,0.0001762423,0.0002362284,0.0003413566],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001705458,"about_ca_system_score_gemma":0.0001799444,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0007187034,"about_ca_topic_score_gemma":0.001542226,"domain_scores_codex":[0.999897,0.000007086527,0.000004469834,0.00002103784,0.00005211201,0.00001834555],"domain_scores_gemma":[0.9998467,0.00004299368,0.00001540461,0.00001870918,0.0000631094,0.00001316877],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004951517,0.000005961695,0.0002113708,0.00002686223,0.00000372754,0.00002028781,0.0000157726,0.00006263149,0.998531,0.00002642278,0.00004120432,0.001005327],"study_design_scores_gemma":[0.000009469549,0.0002780031,0.006052295,0.00000448766,0.00001897801,0.00009272688,0.00004612161,0.001217614,0.9911354,0.00004167806,0.001098438,0.000004768559],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9915843,0.0007304242,0.005646655,0.00004817387,0.00003553125,0.00003573201,0.0002576702,0.000061938,0.001599568],"genre_scores_gemma":[0.9929436,0.0002881365,0.004283359,0.00003012481,0.000007733018,0.00003787755,0.0003160302,0.00003038854,0.002062807],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.00234793,"threshold_uncertainty_score":0.007854581,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.006176570563571117,"score_gpt":0.2063702302140261,"score_spread":0.200193659650455,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}