{"id":"W2195482241","doi":"10.3390/mi6121466","title":"Measuring the Quality Factor in MEMS Devices","year":2015,"lang":"en","type":"article","venue":"Micromachines","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":11,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Microelectromechanical systems; Cantilever; Actuator; Bandwidth (computing); Natural frequency; Logarithm; Control theory (sociology); Q factor; Acoustics; Engineering; Electronic engineering; Physics; Computer science; Electrical engineering; Structural engineering; Mathematics; Optoelectronics; Vibration; Telecommunications; Mathematical analysis","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.001014029,0.0004232534,0.0003246524,0.0007269752,0.0002514981,0.0004308579,0.0005165765,0.000592035,0.000957708],"category_scores_gemma":[0.003341163,0.0002730643,0.0001816817,0.0004336176,0.000574653,0.001140083,0.0004046946,0.0003178898,0.0003007829],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003203761,"about_ca_system_score_gemma":0.0001332878,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004218105,"about_ca_topic_score_gemma":0.000509371,"domain_scores_codex":[0.9991444,0.0001036763,0.00004030845,0.0001784816,0.0004841433,0.0000489685],"domain_scores_gemma":[0.9982741,0.00101562,0.0002547546,0.000130273,0.0002901794,0.00003514063],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0002115031,0.00003716229,0.005825792,0.0002013119,0.0000255242,0.00008114306,0.0002386162,0.002309989,0.9293265,0.001096685,0.0001455825,0.06050029],"study_design_scores_gemma":[0.00004455201,0.0009733158,0.02946703,0.00005959439,0.00004769938,0.0007377757,0.000198041,0.03025055,0.9321879,0.001723314,0.004222735,0.00008753235],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.5834774,0.00285053,0.4095684,0.0001619289,0.00009514795,0.000121861,0.0001740044,0.0007233858,0.002827306],"genre_scores_gemma":[0.9341108,0.0007832692,0.06386983,0.00005251662,0.0000288293,0.00004994925,0.00008218832,0.00006557263,0.000957073],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001014029,"threshold_uncertainty_score":0.005362749,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.06751776871095731,"score_gpt":0.2941048138744605,"score_spread":0.2265870451635032,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}