{"id":"W2204753321","doi":"10.1149/06906.0079ecst","title":"Combined Surface-Activated Bonding Technique for Low-Temperature Cu/SiO<sub>2</sub> Hybrid Bonding","year":2015,"lang":"en","type":"article","venue":"ECS Transactions","topic":"3D IC and TSV technologies","field":"Engineering","cited_by":7,"is_retracted":false,"has_abstract":true,"ca_institutions":"Optech (Canada)","funders":"","keywords":"Anodic bonding; Direct bonding; Chemisorption; Materials science; Wafer bonding; Wafer; Thermocompression bonding; Ion; Bond energy; Composite material; Chemistry; Adsorption; Nanotechnology; Layer (electronics); Molecule; Physical chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0001612371,0.0002845917,0.0002933426,0.0001970587,0.0002257064,0.00006729503,0.0001953027,0.0002615606,0.00001272928],"category_scores_gemma":[0.00003113197,0.0002986675,0.0001370187,0.0004609067,0.00005940202,0.0003348552,0.000008024807,0.0005192158,0.00002206249],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002028153,"about_ca_system_score_gemma":0.00004377959,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000007090634,"about_ca_topic_score_gemma":0.000008650957,"domain_scores_codex":[0.9988562,0.00001541187,0.0002723942,0.0002620162,0.0001537069,0.0004402507],"domain_scores_gemma":[0.99936,0.00007597702,0.0000371211,0.0003109857,0.00008477511,0.0001311234],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002347483,0.00004530358,0.00001580636,0.00007149491,0.00007176345,0.00000883576,0.00009819453,0.01208228,0.9822265,0.0004372611,0.00447171,0.000447402],"study_design_scores_gemma":[0.000666439,0.00008051904,0.00002369348,0.00008617208,0.00004082262,0.00002978281,0.0002564791,0.002414091,0.9906342,0.0010138,0.004400181,0.0003538123],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7982907,0.0001437195,0.1963292,0.0003114732,0.0006785962,0.0007288014,0.0001063016,0.002722188,0.0006890193],"genre_scores_gemma":[0.9951844,0.00004550234,0.004108631,0.00001525819,0.00004343181,0.0002377073,0.00004326267,0.00009195365,0.0002299114],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1968936,"threshold_uncertainty_score":0.9999465,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0140800712540633,"score_gpt":0.2177322741311591,"score_spread":0.2036522028770958,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}