{"id":"W2213039815","doi":"10.3390/photonics2041164","title":"Low-Temperature Bonding for Silicon-Based Micro-Optical Systems","year":2015,"lang":"en","type":"article","venue":"Photonics","topic":"Photonic and Optical Devices","field":"Engineering","cited_by":24,"is_retracted":false,"has_abstract":true,"ca_institutions":"McMaster University","funders":"Natural Sciences and Engineering Research Council of Canada; University of Tokyo","keywords":"Materials science; Photonics; Silicon photonics; Electronics; Direct bonding; Electronic component; Silicon; Interface (matter); Wafer bonding; Optoelectronics; Nanotechnology; System integration; Wafer; Fabrication; Computer science; Electronic engineering; Electrical engineering; Engineering","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002269395,0.000203017,0.000274364,0.00005318723,0.00004987312,0.0001102979,0.0001941431,0.0001945971,0.000009157715],"category_scores_gemma":[0.00008259642,0.0001877156,0.00009835634,0.0001336521,0.00003713136,0.00008901965,0.0000192415,0.0002180193,0.00006384957],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000157937,"about_ca_system_score_gemma":0.00009641577,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000006094348,"about_ca_topic_score_gemma":0.000006392874,"domain_scores_codex":[0.9989326,0.00001077975,0.0002414137,0.0002132338,0.0001758269,0.0004261416],"domain_scores_gemma":[0.999191,0.0001570556,0.0000221525,0.0002644807,0.00008977188,0.0002754942],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.0002164588,0.000273767,0.0002292583,0.002641072,0.000272655,0.00006322301,0.0006719469,0.1732011,0.7461985,0.05246627,0.02330503,0.0004606734],"study_design_scores_gemma":[0.0009353515,0.0000715893,0.00001723486,0.00009708999,0.00003573362,0.00000852236,0.0001270311,0.6466021,0.2905761,0.0001358243,0.06106367,0.0003297157],"study_design_candidate":"bench_or_experimental","study_design_consensus":null,"genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9823702,0.002787567,0.001226109,0.0001142045,0.001625444,0.0006704414,0.00008307655,0.0005305755,0.01059238],"genre_scores_gemma":[0.9966914,0.00001455216,0.002568487,0.0001818593,0.0001067758,0.0001252895,0.00004179639,0.00005896904,0.0002108866],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.473401,"threshold_uncertainty_score":0.7654818,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01594025390708997,"score_gpt":0.233385286163179,"score_spread":0.217445032256089,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}