{"id":"W2217997521","doi":"10.1116/1.4935447","title":"Novel copper compounds for vapor deposition: Characterization and thermolysis","year":2015,"lang":"en","type":"article","venue":"Journal of Vacuum Science & Technology A Vacuum Surfaces and Films","topic":"Copper Interconnects and Reliability","field":"Materials Science","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Carleton University","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Thermogravimetric analysis; Copper; Benzamide; Volatility (finance); Thermal stability; Thermal decomposition; Chemistry; Amide; Chemical vapor deposition; Reactivity (psychology); Metal; Inorganic chemistry; Organic chemistry; Materials science","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002162521,0.000363204,0.0002577797,0.0003504252,0.0003485498,0.0003641177,0.000439631,0.0002985121,0.001457467],"category_scores_gemma":[0.0004189787,0.0002092004,0.0001105515,0.0003258463,0.0002205086,0.0002524338,0.0001557251,0.0003134503,0.0004175695],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004352968,"about_ca_system_score_gemma":0.000268646,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001038846,"about_ca_topic_score_gemma":0.002637302,"domain_scores_codex":[0.9997875,0.00002018108,0.00001307834,0.00003738391,0.0001030941,0.00003875652],"domain_scores_gemma":[0.9998258,0.00003286003,0.00004236084,0.00002444581,0.00005828495,0.00001631233],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000208415,0.00000840537,0.0001367979,0.0000783872,0.000003805083,0.00008660874,0.00004062965,0.00008548974,0.996913,0.0001201422,0.0001040247,0.002402003],"study_design_scores_gemma":[0.000003004239,0.00005444024,0.000443462,0.000004785552,0.00000281379,0.0001134931,0.00001188162,0.0003205507,0.9971462,0.00001210287,0.00188463,0.000002663967],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9678334,0.005124507,0.01463083,0.0001100719,0.00005384574,0.0002614359,0.00065454,0.0002941893,0.01103706],"genre_scores_gemma":[0.9779871,0.002333838,0.01581773,0.00002810559,0.00002412513,0.0001517949,0.0004806458,0.00008358459,0.003093158],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001457467,"threshold_uncertainty_score":0.00487566,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02145633356951332,"score_gpt":0.266823989299445,"score_spread":0.2453676557299317,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}