{"id":"W2218425088","doi":"10.1021/acs.chemmater.5b04562","title":"Atomic Layer Deposition of Gold Metal","year":2015,"lang":"en","type":"article","venue":"Chemistry of Materials","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":122,"is_retracted":false,"has_abstract":true,"ca_institutions":"Carleton University","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Citation; Altmetrics; Computer science; Library science; Social media; Atomic layer deposition; World Wide Web; Layer (electronics); Nanotechnology; Materials science","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":true,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001215258,0.0000908504,0.0002504845,0.00001126449,0.000003428162,0.00001173937,0.00009514471,0.0000742198,0.0003038722],"category_scores_gemma":[0.00001581875,0.00008653259,0.00002747661,0.00002801831,0.0000260348,0.00006689916,0.00002101755,0.00001541246,0.00001306553],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0000160999,"about_ca_system_score_gemma":0.00001136173,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001898383,"about_ca_topic_score_gemma":1.402796e-7,"domain_scores_codex":[0.9994568,0.000008167105,0.0002781747,0.00007455931,0.00009125355,0.00009100467],"domain_scores_gemma":[0.999687,0.000008556437,0.00007384711,0.0001445415,0.0000429819,0.00004311725],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001476959,0.000008901277,0.00001992126,0.0004816171,0.00002523654,8.253987e-7,0.00005158454,0.00005132179,0.9989312,0.000008927834,0.0003920029,0.00001366928],"study_design_scores_gemma":[0.0002138095,0.00000660319,0.00006475131,0.00004103622,0.00002032389,0.000008701493,0.00004510244,0.00001368407,0.9992236,0.0001103534,0.0001683348,0.00008365518],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9969293,0.0002768077,0.000006469825,0.00000252448,0.0004006409,0.00003827589,0.00007081463,0.00005934213,0.002215855],"genre_scores_gemma":[0.9995199,0.00001284369,0.0002480432,0.000003273011,0.0001207863,0.000004658885,0.00003287932,0.00001609023,0.00004156908],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002590587,"threshold_uncertainty_score":0.3528697,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02389473307123713,"score_gpt":0.2283459568010596,"score_spread":0.2044512237298225,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}