{"id":"W2218425088","doi":"10.1021/acs.chemmater.5b04562","title":"Atomic Layer Deposition of Gold Metal","year":2015,"lang":"en","type":"article","venue":"Chemistry of Materials","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":122,"is_retracted":false,"has_abstract":true,"ca_institutions":"Carleton University","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Citation; Altmetrics; Computer science; Library science; Social media; Atomic layer deposition; World Wide Web; Layer (electronics); Nanotechnology; Materials science","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":true,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002410914,0.0005259346,0.000317254,0.0005219128,0.0004277813,0.0004385265,0.0006212688,0.0005221606,0.01485214],"category_scores_gemma":[0.0004156101,0.0004474365,0.0004030277,0.000441867,0.0001520194,0.0003809675,0.0005193824,0.000729413,0.006339309],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0006399799,"about_ca_system_score_gemma":0.000385306,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001517742,"about_ca_topic_score_gemma":0.004615098,"domain_scores_codex":[0.9996779,0.00001635675,0.00002650869,0.00009811034,0.0001030221,0.00007819831],"domain_scores_gemma":[0.9998388,0.00001961404,0.00001562554,0.00005357802,0.0000528575,0.0000194829],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00008649541,0.00003723553,0.0004304423,0.0004185583,0.0000400969,0.0002548091,0.0001226738,0.0003165524,0.955456,0.002084812,0.01942694,0.02132544],"study_design_scores_gemma":[0.00001838655,0.0001495833,0.001339183,0.00004710499,0.00002360353,0.0001532717,0.00006324516,0.002377337,0.9313663,0.0003168051,0.06412023,0.00002488298],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.646201,0.01883106,0.06245086,0.004983235,0.01037089,0.001271485,0.01239118,0.007218037,0.2362823],"genre_scores_gemma":[0.8126637,0.006157414,0.05896363,0.001047398,0.0001742377,0.0004928125,0.007052801,0.0005112393,0.1129368],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.01485214,"threshold_uncertainty_score":0.04968536,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02389473307123713,"score_gpt":0.2283459568010596,"score_spread":0.2044512237298225,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}