{"id":"W2220936619","doi":"10.1557/proc-872-j12.2","title":"Hot Embossing Lithography: Release Layer Characterization by Chemical Force Microscopy","year":2005,"lang":"en","type":"article","venue":"MRS Proceedings","topic":"Nanofabrication and Lithography Techniques","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":false,"ca_institutions":"National Research Council Canada","funders":"","keywords":"Materials science; Embossing; Polymer; Adhesion; Layer (electronics); Chemical engineering; Lithography; Glass transition; Substrate (aquarium); Silane; Composite material; Nanotechnology; Polymer chemistry; Optoelectronics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00009254214,0.0001963533,0.0001587388,0.0001761697,0.0000743263,0.0001367352,0.0001623501,0.0001362434,0.00004231858],"category_scores_gemma":[0.00001089015,0.0002091433,0.00008651264,0.0005242711,0.00004606798,0.0004401675,0.00001797138,0.000172797,0.00001857597],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0000455936,"about_ca_system_score_gemma":0.00000606514,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000002187576,"about_ca_topic_score_gemma":7.291236e-8,"domain_scores_codex":[0.999063,0.000002566649,0.0002535089,0.0002392499,0.0001484881,0.0002931802],"domain_scores_gemma":[0.9996409,0.000006388315,0.00005571553,0.00009752735,0.00008101251,0.0001184037],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000009046792,0.00002695605,0.001469519,0.00004638753,0.00001155132,1.4797e-7,0.0002470261,5.993371e-7,0.9741654,0.0002750839,0.008725174,0.01502316],"study_design_scores_gemma":[0.0001599529,0.00001420005,0.0009792495,0.00004197837,0.00001302823,0.000005104381,0.00001952398,0.0019109,0.8145579,0.00004614599,0.1819976,0.0002544563],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.98206,0.0003136197,0.0100355,0.0002933483,0.00006740962,0.0002558481,0.00002256069,0.001894926,0.005056813],"genre_scores_gemma":[0.987666,0.0001600524,0.01116161,0.0003476776,0.0001667847,0.00006997511,0.00007151378,0.00005817825,0.0002982567],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1732724,"threshold_uncertainty_score":0.8528617,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005543564066905806,"score_gpt":0.2207790304984168,"score_spread":0.215235466431511,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}