{"id":"W2223362452","doi":"10.1149/06906.0091ecst","title":"Electrografted P4VP as Dielectric in High Aspect Ratio TSV: Surface Preparation and Thermomechanical Consideration","year":2015,"lang":"en","type":"article","venue":"ECS Transactions","topic":"3D IC and TSV technologies","field":"Engineering","cited_by":5,"is_retracted":false,"has_abstract":true,"ca_institutions":"Institut National de la Recherche Scientifique; Université de Sherbrooke","funders":"Natural Sciences and Engineering Research Council of Canada; Institut national de la recherche scientifique; Université de Sherbrooke","keywords":"Materials science; Through-silicon via; Dielectric; Silicon; Substrate (aquarium); Conformal map; Deposition (geology); Composite material; Layer (electronics); Microsystem; Aqueous solution; Optoelectronics; Nanotechnology; Organic chemistry","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001225993,0.0002777353,0.0001596756,0.00009724662,0.0001618424,0.0002971576,0.0002220667,0.0003293442,0.0004878934],"category_scores_gemma":[0.0001895207,0.0001931715,0.00009932325,0.0001341784,0.0002352461,0.000245715,0.000168279,0.0002925235,0.0001590841],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002242467,"about_ca_system_score_gemma":0.0001165516,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005054284,"about_ca_topic_score_gemma":0.0007912152,"domain_scores_codex":[0.9998971,0.00001204983,0.000004090929,0.00002320715,0.0000430597,0.00002048715],"domain_scores_gemma":[0.9999245,0.00002089134,0.00001927635,0.000009798077,0.00001768553,0.000007804068],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001381934,0.000004657415,0.00008397715,0.00002604899,0.000001918454,0.00005416262,0.00001816987,0.0003236982,0.9986849,0.0000608782,0.00002531977,0.0007024159],"study_design_scores_gemma":[0.000001993837,0.0001061931,0.0007215134,0.000003009362,0.000003327523,0.00006526289,0.00002937438,0.001605429,0.9966923,0.00003648592,0.0007317972,0.000003216101],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.993954,0.0007950633,0.003890373,0.0000598866,0.00003128921,0.00002103966,0.00007361859,0.00003850482,0.001136237],"genre_scores_gemma":[0.9938147,0.0006419729,0.004296875,0.00001457597,0.000005927954,0.00001878496,0.00006478541,0.00001909695,0.001123226],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0005054284,"threshold_uncertainty_score":0.001632154,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01235169778342708,"score_gpt":0.2287343928035976,"score_spread":0.2163826950201705,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}