{"id":"W2236901080","doi":"10.1149/ma2012-02/28/2480","title":"New Reaction Chemistries for Late Transition Metal Atomic Layer Deposition","year":2012,"lang":"en","type":"article","venue":"ECS Meeting Abstracts","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"McMaster University","funders":"","keywords":"Atomic layer deposition; Transition metal; Layer (electronics); Deposition (geology); Chemistry; Transition layer; Nanotechnology; Materials science; Chemical engineering; Geology; Catalysis; Organic chemistry; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000634601,0.0006567113,0.0003891122,0.0004810117,0.0005232206,0.0004779304,0.001001859,0.0004294062,0.009024594],"category_scores_gemma":[0.0004958083,0.0003963994,0.0004087509,0.0002485785,0.0002602631,0.001140538,0.0004721867,0.001733931,0.002934976],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004894756,"about_ca_system_score_gemma":0.0002697053,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003984424,"about_ca_topic_score_gemma":0.001480449,"domain_scores_codex":[0.999736,0.00003514487,0.0000191316,0.00004982143,0.0001203005,0.00003961473],"domain_scores_gemma":[0.9998621,0.00003507081,0.00002235807,0.00003402092,0.00002896027,0.00001743681],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001516493,0.00009024858,0.00008681331,0.0006231108,0.00002174396,0.00007185973,0.00003763682,0.0003661204,0.9728085,0.003676961,0.002063923,0.02000139],"study_design_scores_gemma":[0.00005776064,0.0002316696,0.0001973504,0.00001965224,0.00002284592,0.0001957384,0.0000114528,0.001690122,0.958041,0.0005633012,0.03895201,0.000017114],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.365684,0.0559439,0.4713989,0.002800072,0.003509368,0.001591031,0.00327863,0.00621247,0.08958162],"genre_scores_gemma":[0.6914453,0.03071417,0.2058768,0.0009582245,0.0005060731,0.0009328281,0.002781499,0.000908271,0.06587683],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.009024594,"threshold_uncertainty_score":0.03019029,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01816887000363337,"score_gpt":0.2310733960754928,"score_spread":0.2129045260718594,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}