{"id":"W2243191590","doi":"10.4028/www.scientific.net/msf.821-823.528","title":"Thermal Laser Separation – A Novel Dicing Technology Fulfilling the Demands of Volume Manufacturing of 4H-SiC Devices","year":2015,"lang":"en","type":"article","venue":"Materials science forum","topic":"Advanced Surface Polishing Techniques","field":"Engineering","cited_by":18,"is_retracted":false,"has_abstract":true,"ca_institutions":"Infineon Technologies (Canada)","funders":"","keywords":"Wafer dicing; Materials science; Wafer; Volume (thermodynamics); Thermal; Mechanical engineering; Optoelectronics; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003297762,0.0003835394,0.0004592319,0.0007359532,0.0003502863,0.0006470103,0.0006431239,0.0006464081,0.001544959],"category_scores_gemma":[0.0003670886,0.0003403578,0.0004550827,0.000367193,0.000536576,0.0008586429,0.0004664042,0.0006295246,0.0006180382],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003248026,"about_ca_system_score_gemma":0.0003991478,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002307948,"about_ca_topic_score_gemma":0.0005082539,"domain_scores_codex":[0.9993962,0.00003787604,0.00002914722,0.0001117586,0.0003696378,0.00005524476],"domain_scores_gemma":[0.9996957,0.00005423124,0.00008540075,0.00006773043,0.00007612771,0.00002075703],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003630797,0.00001269689,0.0001528376,0.0002685976,0.00001067529,0.0000870591,0.0000475668,0.00046915,0.981307,0.0008513639,0.0003703288,0.01638639],"study_design_scores_gemma":[0.00001995727,0.0004545817,0.002290883,0.00001695494,0.00002317793,0.001185877,0.00004002229,0.005352345,0.9768963,0.0004329751,0.01325701,0.0000299979],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.6367179,0.02239814,0.3114511,0.0009436181,0.0007097964,0.000442868,0.0006212086,0.001987686,0.02472765],"genre_scores_gemma":[0.814901,0.004610315,0.1736729,0.0002529937,0.0002956359,0.0001119595,0.0003610275,0.0001517272,0.005642517],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001544959,"threshold_uncertainty_score":0.005168378,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01594767935438003,"score_gpt":0.2631358451494026,"score_spread":0.2471881657950226,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}