{"id":"W2247748489","doi":"10.4028/www.scientific.net/msf.821-823.520","title":"Comparison of Different Novel Chip Separation Methods for 4H-SiC","year":2015,"lang":"en","type":"article","venue":"Materials science forum","topic":"Advanced Surface Polishing Techniques","field":"Engineering","cited_by":13,"is_retracted":false,"has_abstract":true,"ca_institutions":"Infineon Technologies (Canada)","funders":"","keywords":"Wafer dicing; Materials science; Wafer; Diamond; Breakage; Laser; Chip; Laser ablation; Optoelectronics; Composite material; Optics; Electrical engineering; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0006546576,0.0004588777,0.000660303,0.001104223,0.0004759194,0.000753946,0.0007949155,0.0006858939,0.002669746],"category_scores_gemma":[0.0008960903,0.0003595907,0.0006153982,0.0006602026,0.000354239,0.0007543345,0.0004508692,0.0005573204,0.001246408],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002926538,"about_ca_system_score_gemma":0.00039548,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005059671,"about_ca_topic_score_gemma":0.002089792,"domain_scores_codex":[0.9993388,0.00004120448,0.00005010228,0.0000905863,0.0003976606,0.00008151853],"domain_scores_gemma":[0.9995155,0.0001304627,0.00006417545,0.00006385658,0.0001896291,0.00003637495],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0003652259,0.0001805412,0.0005134972,0.002024165,0.00008957304,0.0001463704,0.0001643375,0.0006583146,0.9360983,0.0003893903,0.0009752268,0.05839506],"study_design_scores_gemma":[0.00007639336,0.000929881,0.006079254,0.00003589066,0.000117255,0.0006150521,0.0001064804,0.003429214,0.9694862,0.0001046571,0.01896636,0.00005335538],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8776252,0.04397213,0.05866241,0.0003623937,0.0008638313,0.0007670884,0.001038906,0.0009155883,0.01579258],"genre_scores_gemma":[0.8562154,0.02272846,0.1018945,0.0002602403,0.00024376,0.0004394724,0.001776075,0.0002482567,0.01619397],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002669746,"threshold_uncertainty_score":0.00893122,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.08579063471803662,"score_gpt":0.4372932837718319,"score_spread":0.3515026490537952,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}