{"id":"W2247748489","doi":"10.4028/www.scientific.net/msf.821-823.520","title":"Comparison of Different Novel Chip Separation Methods for 4H-SiC","year":2015,"lang":"en","type":"article","venue":"Materials science forum","topic":"Advanced Surface Polishing Techniques","field":"Engineering","cited_by":13,"is_retracted":false,"has_abstract":true,"ca_institutions":"Infineon Technologies (Canada)","funders":"","keywords":"Wafer dicing; Materials science; Wafer; Diamond; Breakage; Laser; Chip; Laser ablation; Optoelectronics; Composite material; Optics; Electrical engineering; Engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0008622066,0.0001161581,0.0002698894,0.00009231899,0.00006152876,0.00007669799,0.0003214122,0.00004541144,0.000006032018],"category_scores_gemma":[0.0002077367,0.0001013541,0.00002333251,0.0001571884,0.0001307559,0.000382643,0.00007800386,0.00003412856,0.000002475155],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001043884,"about_ca_system_score_gemma":0.00002726136,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001096802,"about_ca_topic_score_gemma":0.000004897605,"domain_scores_codex":[0.9990461,0.00001864807,0.0002900228,0.0001576643,0.0001733022,0.0003142719],"domain_scores_gemma":[0.9994771,0.00004713201,0.00007923594,0.0002277794,0.0000903816,0.00007838222],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000008043789,0.00001839777,0.0001615673,0.00002581161,0.000001868033,1.196035e-8,0.0003098374,0.003198018,0.9922806,0.002656535,0.000365378,0.0009739131],"study_design_scores_gemma":[0.0001320905,0.00007783902,0.0002313716,0.00001732766,0.000004385355,5.978154e-7,0.0001028313,0.02781543,0.9643863,0.006314911,0.0008043851,0.0001125354],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.4449519,0.00002929815,0.5537217,0.00003991944,0.0006592157,0.0002134259,0.00002218277,0.0002059355,0.0001563341],"genre_scores_gemma":[0.6993872,9.539486e-7,0.3005157,0.000008348086,0.00002077663,0.00003808817,0.000005406402,0.00001274564,0.00001075705],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.2544352,"threshold_uncertainty_score":0.4133102,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.08579063471803662,"score_gpt":0.4372932837718319,"score_spread":0.3515026490537952,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}