{"id":"W2250195013","doi":"10.1016/j.tsf.2016.01.046","title":"Properties of silicon nitride thin overlays deposited on optical fibers — Effect of fiber suspension in radio frequency plasma-enhanced chemical vapor deposition reactor","year":2016,"lang":"en","type":"article","venue":"Thin Solid Films","topic":"Advanced Fiber Optic Sensors","field":"Engineering","cited_by":4,"is_retracted":false,"has_abstract":false,"ca_institutions":"Université du Québec en Outaouais","funders":"Narodowe Centrum Badań i Rozwoju; Narodowe Centrum Nauki","keywords":"Materials science; Wafer; Silicon nitride; Optical fiber; Fiber; Suspension (topology); Deposition (geology); Overlay; Chemical vapor deposition; Optoelectronics; Plasma-enhanced chemical vapor deposition; Silicon; Optics; Composite material; Computer science","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001766833,0.0001991677,0.0002017322,0.0002126062,0.0002941873,0.0002816807,0.0003114494,0.0003164581,0.001009219],"category_scores_gemma":[0.0004520906,0.0001998381,0.0001617517,0.0001604618,0.0001684763,0.0002316877,0.0001329094,0.0003019808,0.0002082954],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003614439,"about_ca_system_score_gemma":0.0002426975,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.003712946,"about_ca_topic_score_gemma":0.00502384,"domain_scores_codex":[0.9998178,0.00001468265,0.000008824029,0.00004195372,0.00008266611,0.00003409568],"domain_scores_gemma":[0.9996917,0.0001011101,0.00006609133,0.00001995044,0.00008877105,0.00003226593],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00009948049,0.000008944308,0.0002912853,0.00002101671,0.00000592286,0.00003548128,0.00002840357,0.0001236474,0.9989225,0.00002009129,0.00002861706,0.0004145534],"study_design_scores_gemma":[0.000005169066,0.0001357891,0.004036601,0.000004134175,0.00001073981,0.00003569993,0.00004418177,0.001516989,0.9939252,0.000007802161,0.0002739253,0.000003810035],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9988036,0.0002616365,0.0002594996,0.00001611529,0.00001011369,0.000002935817,0.00009028317,0.00001691555,0.0005389474],"genre_scores_gemma":[0.9984761,0.0001655544,0.0003840704,0.000008180778,0.000004446305,0.000003581936,0.0001315625,0.00001142214,0.0008151013],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.003712946,"threshold_uncertainty_score":0.007382691,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008611013963306855,"score_gpt":0.2162854525881034,"score_spread":0.2076744386247965,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}