{"id":"W2258935823","doi":"10.1149/ma2007-02/18/1011","title":"Development of a Manufacturable Single-Wafer HF Vapor Process for Pre-Epitaxial Cleans","year":2007,"lang":"en","type":"article","venue":"ECS Meeting Abstracts","topic":"Engineering Applied Research","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Mitel (Canada)","funders":"","keywords":"Wafer; Epitaxy; Materials science; Process (computing); Optoelectronics; Engineering physics; Computer science; Nanotechnology; Engineering; Operating system","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.001081893,0.0002239415,0.0002394384,0.000164578,0.00009305438,0.00003012986,0.0002343236,0.0001500661,0.000008960887],"category_scores_gemma":[0.0002006148,0.0002338327,0.00005564061,0.0001598902,0.00002835304,0.00008061458,0.00002585051,0.0002776296,0.00001959515],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001460182,"about_ca_system_score_gemma":0.00005742486,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000009754529,"about_ca_topic_score_gemma":0.00002595785,"domain_scores_codex":[0.9981028,0.000004276088,0.0005920238,0.0002342161,0.0003747976,0.0006918433],"domain_scores_gemma":[0.9992265,0.0002572062,0.00008132781,0.0001992888,0.00007774714,0.0001579402],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"simulation_or_modeling","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005259076,0.00007490014,0.00004295996,0.0009802758,0.00006272583,0.000007484386,0.001844319,0.6111123,0.3816891,0.000007260692,0.000138274,0.003987791],"study_design_scores_gemma":[0.0003758574,0.00002932027,0.004981252,0.0001778275,0.000009790022,0.000004648127,0.0001992537,0.003760083,0.986383,0.00005381491,0.003757589,0.0002675548],"study_design_candidate":"bench_or_experimental","study_design_consensus":null,"genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9564162,0.00007234199,0.002843756,0.000009172464,0.0002681685,0.000419189,0.000005598876,0.0003660716,0.03959943],"genre_scores_gemma":[0.9631146,0.000001785686,0.03648084,0.000004160647,0.0001338278,0.00004590067,0.00001344992,0.00008584771,0.0001195826],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.6073522,"threshold_uncertainty_score":0.9535421,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02529807043689519,"score_gpt":0.280501672696061,"score_spread":0.2552036022591658,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}