{"id":"W2260311608","doi":"10.1557/proc-716-b7.23","title":"Synthesis and Characterization of Methyltriethoxysilane Based Low Permittivity (Low-k) Polymeric Dielectrics","year":2002,"lang":"en","type":"article","venue":"MRS Proceedings","topic":"Synthesis and properties of polymers","field":"Materials Science","cited_by":0,"is_retracted":false,"has_abstract":false,"ca_institutions":"University of Waterloo","funders":"","keywords":"Materials science; Dielectric; Spin coating; Fourier transform infrared spectroscopy; Permittivity; Wafer; Curing (chemistry); Coating; Composite material; Annealing (glass); Analytical Chemistry (journal); Chemical engineering; Nanotechnology; Optoelectronics; Organic chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0004340267,0.0001872464,0.0003358427,0.0001377161,0.000132959,0.0001120328,0.0002137112,0.0001020489,0.000709263],"category_scores_gemma":[0.0004293386,0.0001585787,0.00006115426,0.0003282735,0.0001528188,0.0005391429,0.00004450717,0.00007546836,0.00002361307],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00002549132,"about_ca_system_score_gemma":0.00001649878,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00004546489,"about_ca_topic_score_gemma":4.183322e-7,"domain_scores_codex":[0.998718,0.00003206019,0.0002949073,0.0003517337,0.0002945371,0.0003087711],"domain_scores_gemma":[0.9992864,0.0001564452,0.0002360834,0.0001207161,0.000100983,0.00009933085],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003669009,0.00007624739,0.001600977,0.0001384923,0.000006229967,6.189308e-7,0.0003722197,1.423655e-7,0.9732468,0.00004889341,0.00004706755,0.02442561],"study_design_scores_gemma":[0.0001350028,0.00008001576,0.004987815,0.00008397861,0.00003682978,0.000003558119,0.00005807268,0.001884155,0.9922299,0.000005569458,0.0002969907,0.0001981211],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9975008,0.0004087587,0.0001308167,0.000536863,0.0001013155,0.0001506984,0.00002030462,0.00007402238,0.001076378],"genre_scores_gemma":[0.9988173,0.0001785231,0.0003750813,0.0001837677,0.00006940772,0.00003652917,0.000001502857,0.00002557002,0.0003122929],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.02422749,"threshold_uncertainty_score":0.7765933,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.0148238229131298,"score_gpt":0.2021836803301514,"score_spread":0.1873598574170216,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}