{"id":"W2268491873","doi":"10.1557/proc-983-0983-ll05-06","title":"Fabrication of Sub-250nm High Aspect Ratio Apertures by Focused Ion Beam Lithography","year":2006,"lang":"en","type":"article","venue":"MRS Proceedings","topic":"Nanopore and Nanochannel Transport Studies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":false,"ca_institutions":"Western University","funders":"","keywords":"Materials science; Focused ion beam; Fabrication; Lithography; Silicon nitride; Silicon; Nanotechnology; Optics; Optoelectronics; Ion","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003619365,0.0002635326,0.0005191675,0.0002623479,0.000255792,0.0006427017,0.0004294751,0.0004624759,0.0007192242],"category_scores_gemma":[0.0005684489,0.0004508372,0.0002237101,0.0001883217,0.000328309,0.000514505,0.0004279983,0.0004304537,0.0005604386],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0006875152,"about_ca_system_score_gemma":0.0003652192,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0009771287,"about_ca_topic_score_gemma":0.001762913,"domain_scores_codex":[0.9997606,0.00001067711,0.00003022482,0.00005305719,0.000107592,0.00003780192],"domain_scores_gemma":[0.999483,0.0001226842,0.0001397946,0.0001065394,0.00008983964,0.0000581251],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001927346,0.000006424475,0.00007625315,0.00004722693,0.000003401065,0.00004915232,0.00003270147,0.0001257908,0.9977835,0.0003372711,0.00007843545,0.001440598],"study_design_scores_gemma":[0.00001261132,0.00005064788,0.001672824,0.000004112175,0.00000573848,0.0001497959,0.00001553796,0.001694167,0.9928497,0.0001407332,0.003393679,0.0000104445],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9163252,0.002383713,0.07051423,0.0003216065,0.0002182962,0.0002162381,0.001330085,0.00133889,0.007351796],"genre_scores_gemma":[0.8739445,0.0008590656,0.1192753,0.0001077297,0.00001891573,0.0001338521,0.0006331559,0.0001298389,0.004897587],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0009771287,"threshold_uncertainty_score":0.004988253,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.004213173992689384,"score_gpt":0.1693519632780053,"score_spread":0.1651387892853159,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}