{"id":"W2276491288","doi":"10.1149/06604.0161ecst","title":"(Invited) Plasma Processes for Emerging Silicon-Based MEMS, NEMS and Packaging Applications","year":2015,"lang":"en","type":"article","venue":"ECS Transactions","topic":"Nanofabrication and Lithography Techniques","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Oxford Instruments (Canada)","funders":"Lawrence Berkeley National Laboratory","keywords":"Nanoelectromechanical systems; Microelectromechanical systems; Materials science; Nanotechnology; Wafer; Atomic layer deposition; Silicon; Lithography; Etching (microfabrication); Plasma-enhanced chemical vapor deposition; Chemical vapor deposition; Optoelectronics; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00100595,0.001292416,0.0006360163,0.0008479151,0.0007106375,0.002015665,0.00105302,0.003087978,0.06486969],"category_scores_gemma":[0.0009139381,0.0003875812,0.0007477033,0.0006696019,0.0004946881,0.00287248,0.001447436,0.003229464,0.05458876],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0009057136,"about_ca_system_score_gemma":0.0009478841,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0008628174,"about_ca_topic_score_gemma":0.002176835,"domain_scores_codex":[0.9992208,0.00006091912,0.00004471174,0.0001876686,0.0003608125,0.000125101],"domain_scores_gemma":[0.9991525,0.00008522275,0.00005583381,0.00002617005,0.0004088188,0.0002714194],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"not_applicable","study_design_gemma":"not_applicable","study_design_scores_codex":[0.0001392387,0.00005243537,0.0001869317,0.001188806,0.00001826122,0.0001896243,0.00007746712,0.0002467363,0.008321232,0.00213785,0.8650148,0.1224266],"study_design_scores_gemma":[0.000007988411,0.00006194192,0.0003595341,0.000089536,0.000006991459,0.0001495951,0.00004129265,0.0001144346,0.0008451368,0.0006620421,0.9976507,0.00001094546],"study_design_candidate":"not_applicable","study_design_consensus":"not_applicable","genre_codex":"editorial","genre_gemma":"methods","genre_scores_codex":[0.005180277,0.2936601,0.007117993,0.05317757,0.4436601,0.0005036814,0.001553158,0.001109954,0.1940371],"genre_scores_gemma":[0.01690071,0.1462875,0.003875904,0.01739467,0.1013715,0.0003396831,0.001697064,0.0004779001,0.7116552],"genre_candidate":"methods","genre_consensus":null,"teacher_disagreement_score":0.06486969,"threshold_uncertainty_score":0.2170108,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01792741865611805,"score_gpt":0.2450693764510795,"score_spread":0.2271419577949615,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}