{"id":"W2281962343","doi":"10.1557/proc-862-a5.4","title":"Effects of Post Annealing and Material Stability on Undoped and n<sup>+</sup> nc-Si:H Films Deposited at 75 °C Using 13.56 MHz PECVD","year":2005,"lang":"en","type":"article","venue":"MRS Proceedings","topic":"Thin-Film Transistor Technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":false,"ca_institutions":"University of Waterloo","funders":"","keywords":"Materials science; Annealing (glass); Plasma-enhanced chemical vapor deposition; Analytical Chemistry (journal); Amorphous solid; Hydrogen; Oxygen; Chemical vapor deposition; Thin film; Nanocrystalline material; Silicon; Nanotechnology; Crystallography; Composite material; Metallurgy; Chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000215516,0.0002044931,0.0002227914,0.0001396537,0.0003648936,0.0003858829,0.0003194584,0.0003220171,0.002549011],"category_scores_gemma":[0.0006919928,0.0002277706,0.000142077,0.0002086572,0.0002289376,0.0003763748,0.000122284,0.0002726364,0.0002915073],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003357551,"about_ca_system_score_gemma":0.0001970529,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.002549807,"about_ca_topic_score_gemma":0.005484102,"domain_scores_codex":[0.9998221,0.00002034301,0.00001661457,0.00004799243,0.00003800814,0.00005497114],"domain_scores_gemma":[0.9995722,0.0001938209,0.00005803009,0.00004106008,0.0001061266,0.00002866133],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0009892451,0.00003194056,0.0009977582,0.00005505472,0.00002335487,0.0001186701,0.00008412329,0.0002851505,0.9950127,0.00005952522,0.00009194642,0.00225047],"study_design_scores_gemma":[0.000007529286,0.0001843671,0.005350531,0.000003253611,0.00001848032,0.00004784352,0.00004153887,0.0005355995,0.9934411,0.00000739635,0.0003572915,0.000004974917],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9981679,0.0005224879,0.0002885888,0.00003214425,0.00002491536,0.000005309027,0.0001532388,0.00002454148,0.0007809486],"genre_scores_gemma":[0.9978868,0.0001733745,0.0003646746,0.00001878211,0.000008611427,0.000005781042,0.0001857359,0.00002305975,0.001333174],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002549807,"threshold_uncertainty_score":0.008527339,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007917706373809301,"score_gpt":0.192897272274252,"score_spread":0.1849795659004426,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}