{"id":"W2291234329","doi":"10.1063/1.4939912","title":"A generic “micro-Stoney” method for the measurement of internal stress and elastic modulus of ultrathin films","year":2016,"lang":"en","type":"article","venue":"Review of Scientific Instruments","topic":"Advanced Surface Polishing Techniques","field":"Engineering","cited_by":9,"is_retracted":false,"has_abstract":true,"ca_institutions":"MiQro Innovation Collaborative Centre","funders":"Waalse Gewest","keywords":"Materials science; Composite material; Elastic modulus; Stress (linguistics); Internal stress; Modulus; Young's modulus","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0005695451,0.0008614829,0.0005482882,0.00189311,0.0004424717,0.0006091647,0.001047769,0.001070809,0.00369299],"category_scores_gemma":[0.001116462,0.0004991093,0.0004857628,0.001271509,0.0008988613,0.001142259,0.001106511,0.001346771,0.001637306],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002885918,"about_ca_system_score_gemma":0.0005028299,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002124012,"about_ca_topic_score_gemma":0.0004621527,"domain_scores_codex":[0.999011,0.00008321343,0.00004841638,0.000247396,0.0005625283,0.00004729707],"domain_scores_gemma":[0.9994381,0.0001595301,0.0001088235,0.0001342661,0.0001339407,0.00002539804],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00008239468,0.00003128238,0.0008296508,0.0007286608,0.00004511563,0.0001708225,0.000183889,0.0005846883,0.8889624,0.01492356,0.002535713,0.09092178],"study_design_scores_gemma":[0.00001771001,0.0002454137,0.008486139,0.0001433825,0.00006123185,0.001708557,0.0001436081,0.01388514,0.8819188,0.008049758,0.0852119,0.0001284287],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"methods","genre_scores_codex":[0.04048235,0.009632956,0.9354533,0.0005233395,0.0009349078,0.0002798912,0.001147623,0.002062715,0.009482956],"genre_scores_gemma":[0.2871412,0.01142145,0.6753474,0.0006351296,0.0002901793,0.001263927,0.001314598,0.0004232927,0.02216287],"genre_candidate":"methods","genre_consensus":"methods","teacher_disagreement_score":0.00369299,"threshold_uncertainty_score":0.01235425,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02900813324879725,"score_gpt":0.2895636791649959,"score_spread":0.2605555459161986,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}