{"id":"W2291664615","doi":"10.1109/memsys.2016.7421556","title":"A multimode single-chip scanning probe microscope for simultaneous topographical and thermal metrology at the nanometer scale","year":2016,"lang":"en","type":"article","venue":"","topic":"Force Microscopy Techniques and Applications","field":"Physics and Astronomy","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Scanning thermal microscopy; Materials science; Scanning probe microscopy; Microelectromechanical systems; Chip; Optoelectronics; Metrology; Scanning electron microscope; Piezoresistive effect; Microscope; Microscopy; Scanning Hall probe microscope; Optics; Scanning capacitance microscopy; Nanotechnology; Nanoscopic scale; Scanning confocal electron microscopy; Electrical engineering; Physics; Scanning transmission electron microscopy; Conventional transmission electron microscope","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003531931,0.0004633945,0.0004676532,0.0007552466,0.0005965982,0.000403939,0.00105307,0.0009026927,0.003557702],"category_scores_gemma":[0.0004527341,0.0003742299,0.0002902806,0.0003959336,0.0003378631,0.0008612354,0.0007116805,0.0009722558,0.000939426],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004868753,"about_ca_system_score_gemma":0.0006805848,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005972608,"about_ca_topic_score_gemma":0.002818168,"domain_scores_codex":[0.9995117,0.00003690681,0.00001892164,0.0001534893,0.000240709,0.00003831258],"domain_scores_gemma":[0.9996161,0.00008374548,0.00004230348,0.00008845817,0.000121526,0.00004780364],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0000321634,0.00001719143,0.0001883068,0.00009513374,0.00001067593,0.00003903648,0.00002351108,0.0001857689,0.9698532,0.0009283019,0.001191342,0.02743549],"study_design_scores_gemma":[0.00003668038,0.0005285636,0.003280642,0.00002676695,0.00005586763,0.001947558,0.00006021176,0.04737878,0.9040201,0.001170543,0.04141733,0.00007706512],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.1856599,0.00339014,0.7907829,0.0007670778,0.0007420266,0.0005168237,0.00151004,0.006175971,0.01045516],"genre_scores_gemma":[0.2329719,0.0005741584,0.7592729,0.000284577,0.0001297558,0.0004067176,0.0004253699,0.0001396191,0.005794906],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.003557702,"threshold_uncertainty_score":0.01190174,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01047655847113777,"score_gpt":0.2574584017227326,"score_spread":0.2469818432515948,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}