{"id":"W2291664615","doi":"10.1109/memsys.2016.7421556","title":"A multimode single-chip scanning probe microscope for simultaneous topographical and thermal metrology at the nanometer scale","year":2016,"lang":"en","type":"article","venue":"","topic":"Force Microscopy Techniques and Applications","field":"Physics and Astronomy","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Scanning thermal microscopy; Materials science; Scanning probe microscopy; Microelectromechanical systems; Chip; Optoelectronics; Metrology; Scanning electron microscope; Piezoresistive effect; Microscope; Microscopy; Scanning Hall probe microscope; Optics; Scanning capacitance microscopy; Nanotechnology; Nanoscopic scale; Scanning confocal electron microscopy; Electrical engineering; Physics; Scanning transmission electron microscopy; Conventional transmission electron microscope","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00009752811,0.0001427349,0.0001469629,0.00003370368,0.0002859782,0.00004125194,0.0001459082,0.00005023801,0.0002775021],"category_scores_gemma":[0.000005476898,0.00007256882,0.0000991959,0.00007591203,0.0002564879,0.00004489689,0.0001128946,0.00005773646,0.000009446164],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00001701489,"about_ca_system_score_gemma":0.00001008682,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00009145599,"about_ca_topic_score_gemma":0.00002858039,"domain_scores_codex":[0.9991851,0.00002131854,0.0001664511,0.0002872316,0.00004615559,0.0002937584],"domain_scores_gemma":[0.9992976,0.000307933,0.00005925807,0.000237037,0.00004058381,0.00005763044],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003969136,0.00007006588,0.007208505,0.000003807283,0.00002627357,9.307522e-8,0.00007605564,0.000004526113,0.9634082,0.004483856,0.0003673576,0.02431157],"study_design_scores_gemma":[0.001349743,0.0003855354,0.0007161952,0.00003670481,0.00007453524,0.000005486833,0.0001263165,0.001962028,0.9335833,0.00457715,0.05675197,0.0004310911],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7855191,0.00004143058,0.2109689,0.001443869,0.00002017506,0.0005813825,0.0000746666,0.00005201803,0.001298415],"genre_scores_gemma":[0.9704293,0.000001353668,0.02588229,0.0002044136,0.00007500938,0.0003003896,0.00001063451,0.00002228442,0.00307433],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.1850866,"threshold_uncertainty_score":0.3038453,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01047655847113777,"score_gpt":0.2574584017227326,"score_spread":0.2469818432515948,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}