{"id":"W2294751495","doi":"10.1080/15599612.2015.1095956","title":"Closed-loop control of a 2-D mems micromirror with sidewall electrodes for a laser scanning microscope system","year":2015,"lang":"en","type":"article","venue":"International Journal of Optomechatronics","topic":"Advanced Optical Sensing Technologies","field":"Physics and Astronomy","cited_by":10,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"National Key Research and Development Program of China; Natural Sciences and Engineering Research Council of Canada; National Natural Science Foundation of China","keywords":"Detector; Optics; Field-programmable gate array; Laser; Microscope; Microelectromechanical systems; Digital micromirror device; Computer science; Laser scanning; Tracking (education); SIGNAL (programming language); Materials science; Physics; Computer hardware; Optoelectronics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002866586,0.0003282233,0.0002777051,0.0001265441,0.0002198177,0.0003656467,0.0006659013,0.0003848049,0.0009608305],"category_scores_gemma":[0.0003569339,0.000189874,0.0002081461,0.00006518039,0.0002020117,0.0003026382,0.0002617879,0.0002472565,0.0001863512],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000230939,"about_ca_system_score_gemma":0.0004012331,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0008954288,"about_ca_topic_score_gemma":0.001249434,"domain_scores_codex":[0.999687,0.00003258142,0.00002133158,0.00009014698,0.0001465,0.00002253328],"domain_scores_gemma":[0.9998392,0.00003672818,0.00003422353,0.0000252754,0.00005216997,0.00001232833],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0002771467,0.00005505733,0.0006830697,0.0001291304,0.00002285701,0.0002122126,0.0001464568,0.01250884,0.9234027,0.001363514,0.0003707368,0.06082811],"study_design_scores_gemma":[0.0001481707,0.00131705,0.003791258,0.00001950011,0.00003829417,0.0005885131,0.00004312766,0.5421568,0.4433692,0.000487922,0.007979843,0.00006023064],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.3038327,0.0004885356,0.6880891,0.000184028,0.0002065609,0.0001962207,0.00007727161,0.00205128,0.004874326],"genre_scores_gemma":[0.8897073,0.00009209149,0.1075827,0.00004444653,0.00002405968,0.0000975238,0.00002921473,0.00002157539,0.002400978],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.0009608305,"threshold_uncertainty_score":0.0032143,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01251667992194037,"score_gpt":0.2844437482531951,"score_spread":0.2719270683312547,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}