{"id":"W2309539461","doi":"10.1021/acsami.6b01927","title":"Catalyst Self-Assembly for Scalable Patterning of Sub 10 nm Ultrahigh Aspect Ratio Nanopores in Silicon","year":2016,"lang":"en","type":"article","venue":"ACS Applied Materials & Interfaces","topic":"Nanowire Synthesis and Applications","field":"Engineering","cited_by":23,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"Natural Sciences and Engineering Research Council of Canada; Deshpande Center for Technological Innovation, Massachusetts Institute of Technology; National Science Foundation","keywords":"Materials science; Nanotechnology; Silicon; Nanopore; Etching (microfabrication); Nanolithography; Aspect ratio (aeronautics); Fabrication; Isotropic etching; Substrate (aquarium); Nanomaterial-based catalyst; Nanoporous; Nanoparticle; Optoelectronics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000128209,0.0002288372,0.0001516027,0.0001821534,0.0001043043,0.0002023691,0.0002583129,0.0002024886,0.0004768476],"category_scores_gemma":[0.0001432091,0.000179643,0.0001870388,0.000103332,0.000185236,0.0002070341,0.0002497211,0.0002600572,0.0002385478],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002116241,"about_ca_system_score_gemma":0.0001552023,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00023773,"about_ca_topic_score_gemma":0.0009837671,"domain_scores_codex":[0.99988,0.00000797079,0.00001056264,0.00003360061,0.0000543209,0.00001355409],"domain_scores_gemma":[0.9999213,0.00001976818,0.00002957837,0.00001031317,0.0000114866,0.0000076324],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000004590256,0.000006526159,0.00005467549,0.00002912418,0.000002346719,0.00002467743,0.00001228711,0.0001746545,0.9969583,0.000205838,0.00004847284,0.002478541],"study_design_scores_gemma":[0.000002830411,0.00003428476,0.00035511,0.000001398877,0.000002635819,0.0000471572,0.000005817699,0.002921622,0.995054,0.00003761636,0.001534567,0.000002842693],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9057999,0.001412589,0.08436462,0.0001566222,0.00009611789,0.000135948,0.0002924504,0.000831764,0.006910095],"genre_scores_gemma":[0.9321881,0.0007927081,0.06377455,0.00005069349,0.0000212464,0.0000633813,0.0001764005,0.00006861595,0.002864398],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0004768476,"threshold_uncertainty_score":0.001595199,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.00752916481208738,"score_gpt":0.209260079168121,"score_spread":0.2017309143560337,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}