{"id":"W2309539461","doi":"10.1021/acsami.6b01927","title":"Catalyst Self-Assembly for Scalable Patterning of Sub 10 nm Ultrahigh Aspect Ratio Nanopores in Silicon","year":2016,"lang":"en","type":"article","venue":"ACS Applied Materials & Interfaces","topic":"Nanowire Synthesis and Applications","field":"Engineering","cited_by":23,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"Natural Sciences and Engineering Research Council of Canada; Deshpande Center for Technological Innovation, Massachusetts Institute of Technology; National Science Foundation","keywords":"Materials science; Nanotechnology; Silicon; Nanopore; Etching (microfabrication); Nanolithography; Aspect ratio (aeronautics); Fabrication; Isotropic etching; Substrate (aquarium); Nanomaterial-based catalyst; Nanoporous; Nanoparticle; Optoelectronics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002569495,0.0002130212,0.0003872544,0.00009622925,0.00004165611,0.00005783102,0.0002477207,0.0001030643,0.0001498188],"category_scores_gemma":[0.00001727524,0.0001627801,0.00002099665,0.0000911013,0.00003235809,0.0001191026,0.00003850252,0.00003141365,0.00008929162],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0000584923,"about_ca_system_score_gemma":0.00001650575,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00004632452,"about_ca_topic_score_gemma":0.00006106492,"domain_scores_codex":[0.9988002,0.00001563958,0.0005263706,0.000265074,0.0001035951,0.00028911],"domain_scores_gemma":[0.9993528,0.0001877262,0.000121058,0.0002684472,0.00003798772,0.00003204443],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002998797,0.00003941279,0.00005450516,0.0001474709,0.00004289973,2.386542e-7,0.0001491164,0.00008203462,0.9958236,0.0009178912,0.0004691721,0.0022437],"study_design_scores_gemma":[0.000393402,0.00002626206,0.0003165505,0.0001055885,0.00002180129,8.450781e-7,0.00005865374,0.000008058842,0.9981123,0.0002751641,0.0004722549,0.0002091441],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.997799,0.00008122476,0.0004472731,0.00006765876,0.0001425032,0.0005065459,0.0001495086,0.0001830226,0.0006231951],"genre_scores_gemma":[0.9989111,0.00007915749,0.0002840024,0.000007756134,0.0000784814,0.0005023946,0.00002137319,0.00005313997,0.00006260314],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002288704,"threshold_uncertainty_score":0.6637978,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.00752916481208738,"score_gpt":0.209260079168121,"score_spread":0.2017309143560337,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}