{"id":"W2310543875","doi":"10.1109/isiss.2016.7435554","title":"Dual mode resonant capacitive MEMS accelerometer","year":2016,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":6,"is_retracted":false,"has_abstract":true,"ca_institutions":"Simon Fraser University","funders":"Natural Sciences and Engineering Research Council of Canada; CMC Microsystems","keywords":"Proof mass; Capacitive sensing; Accelerometer; Resonator; Capacitance; Microelectromechanical systems; Acceleration; Materials science; Electrode; Displacement (psychology); Optoelectronics; Fabrication; Acoustics; Electrical engineering; Physics; Engineering","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003906411,0.000684352,0.0007169754,0.0005064426,0.0003453066,0.0006745186,0.001472374,0.001346896,0.003579779],"category_scores_gemma":[0.001016645,0.0005435303,0.0003080466,0.0003342091,0.0002882042,0.0008582997,0.0008113242,0.000649457,0.002023711],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003997331,"about_ca_system_score_gemma":0.000353682,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004460855,"about_ca_topic_score_gemma":0.0006944971,"domain_scores_codex":[0.9980862,0.0001078918,0.0000654215,0.0005614753,0.001062654,0.0001163827],"domain_scores_gemma":[0.9994034,0.0001319363,0.00007847937,0.00008012147,0.0002515311,0.00005453492],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001978324,0.00007241288,0.0009330878,0.0002284786,0.00001967631,0.0001786092,0.00005114457,0.0005359111,0.9642836,0.0008778792,0.001714195,0.03090726],"study_design_scores_gemma":[0.0001367413,0.001615692,0.01068992,0.00006348899,0.0001109396,0.004645552,0.00008399149,0.05755607,0.8805459,0.0007396797,0.04364346,0.0001686537],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.3257701,0.00507715,0.6241555,0.001092461,0.001660169,0.0008290002,0.002272774,0.004632374,0.03451054],"genre_scores_gemma":[0.7285666,0.001098607,0.2514459,0.0005453306,0.0002449606,0.0003030741,0.0005677055,0.0001139093,0.01711388],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.003579779,"threshold_uncertainty_score":0.01197553,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01581905180222847,"score_gpt":0.22852435707328,"score_spread":0.2127053052710515,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}