{"id":"W2316928240","doi":"10.1166/jnn.2005.092","title":"Functional Pattern Engineering in Glancing Angle Deposition Thin Films","year":2005,"lang":"en","type":"article","venue":"Journal of Nanoscience and Nanotechnology","topic":"Optical Coatings and Gratings","field":"Materials Science","cited_by":20,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Alberta","funders":"Natural Sciences and Engineering Research Council of Canada","keywords":"Materials science; Thin film; Deposition (geology); Physical vapor deposition; Surface micromachining; Planar; Optoelectronics; Pulsed laser deposition; Nanotechnology; Optics; Fabrication; Computer science","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00008875279,0.0005012761,0.0001594953,0.0002292996,0.0001579586,0.0003372465,0.0004810397,0.0002959619,0.001312444],"category_scores_gemma":[0.000180079,0.0003195233,0.000183486,0.0001569413,0.000298318,0.0004282913,0.0003123013,0.0005540604,0.0005397836],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001535784,"about_ca_system_score_gemma":0.00008357315,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002271456,"about_ca_topic_score_gemma":0.0003509304,"domain_scores_codex":[0.9998633,0.00001223691,0.00000843544,0.00002614759,0.00006767373,0.00002219164],"domain_scores_gemma":[0.9998552,0.0000350157,0.00005031213,0.00002998349,0.00001715057,0.00001238847],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001112209,0.000004753264,0.00003670056,0.00003898819,0.000002038456,0.00004770282,0.00001419317,0.0001547483,0.9965238,0.0002709057,0.00005796838,0.002837074],"study_design_scores_gemma":[0.00001185362,0.00007518621,0.0003314651,0.0000027236,0.000002854374,0.0002457627,0.00000919551,0.001145571,0.995052,0.0001841891,0.002933261,0.000005881187],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8432952,0.002511016,0.1400666,0.0004529938,0.0002379286,0.0001032392,0.0003658252,0.001536101,0.01143115],"genre_scores_gemma":[0.8909147,0.001585658,0.1012879,0.0002282197,0.00005657184,0.00007932351,0.0002381659,0.0002503739,0.005359022],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001312444,"threshold_uncertainty_score":0.004390538,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.007559688064843828,"score_gpt":0.2103015554788514,"score_spread":0.2027418674140076,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}