{"id":"W2317373190","doi":"10.1149/1.2981615","title":"Dielectric Properties of SrTiO3 Thin Films on SrRuO3 Seed Prepared by Plasma-enhanced Atomic Layer Deposition","year":2008,"lang":"en","type":"article","venue":"ECS Transactions","topic":"Electronic and Structural Properties of Oxides","field":"Materials Science","cited_by":4,"is_retracted":false,"has_abstract":true,"ca_institutions":"Kootenay Association for Science & Technology","funders":"","keywords":"Thin film; Materials science; Dielectric; Atomic layer deposition; Strontium titanate; Layer (electronics); Annealing (glass); Substrate (aquarium); Deposition (geology); Pulsed laser deposition; Titanium; Chemical engineering; Analytical Chemistry (journal); Composite material; Nanotechnology; Optoelectronics; Chemistry; Metallurgy; Organic chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001185799,0.000193889,0.0003395058,0.0001658388,0.0001538293,0.0002233501,0.0002183851,0.0002580854,0.0009259061],"category_scores_gemma":[0.0003322557,0.0002298146,0.0001763287,0.0001993439,0.0001258513,0.0002076988,0.000107449,0.0003079785,0.0002553492],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001756055,"about_ca_system_score_gemma":0.0001304749,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000979836,"about_ca_topic_score_gemma":0.001280533,"domain_scores_codex":[0.9999245,0.000004351471,0.000004982709,0.00001549769,0.00003173654,0.00001889129],"domain_scores_gemma":[0.9997732,0.00005472091,0.00006966964,0.00001789788,0.00006134414,0.00002313818],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002849806,0.000002465891,0.00008088959,0.00001955634,0.000002297727,0.00004579153,0.0000102722,0.00002460304,0.9995498,0.00001226028,0.00001278514,0.0002108955],"study_design_scores_gemma":[0.00001063782,0.0001101384,0.002861957,0.000004375913,0.00001399451,0.0001424859,0.00002427445,0.0006980936,0.9956989,0.00001067949,0.0004196536,0.000004656185],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9977559,0.0003810867,0.0008948559,0.00003771246,0.00001885381,0.000006634754,0.0001431421,0.00004066738,0.0007209826],"genre_scores_gemma":[0.9964765,0.0004605138,0.001840978,0.00001901768,0.000007669701,0.000009666855,0.0002018972,0.0000276317,0.0009561721],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.000979836,"threshold_uncertainty_score":0.003097415,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01649993190109034,"score_gpt":0.208164907757123,"score_spread":0.1916649758560326,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}