{"id":"W2320138903","doi":"10.1109/eumc.2014.6986405","title":"A novel micro-fabrication process for integration of Superconductor niobium-based RF circuits with gold-based RF MEMS devices","year":2014,"lang":"en","type":"article","venue":"","topic":"Microwave Engineering and Waveguides","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Regina; University of Waterloo","funders":"","keywords":"Materials science; Microelectromechanical systems; Fabrication; Resonator; Band-pass filter; Insertion loss; Optoelectronics; Electronic circuit; Niobium; Radio frequency; Center frequency; Electrical engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001267281,0.0004308636,0.0002753111,0.0002510053,0.0002641245,0.0002494129,0.000800975,0.0003148573,0.0008347744],"category_scores_gemma":[0.0002224524,0.000381559,0.0002494389,0.0001377568,0.0002010667,0.0003837429,0.0002860615,0.0003831396,0.0004388123],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0005492116,"about_ca_system_score_gemma":0.0004462456,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0009733676,"about_ca_topic_score_gemma":0.002181536,"domain_scores_codex":[0.999803,0.000009787865,0.00001289007,0.00003592774,0.0001172213,0.00002110299],"domain_scores_gemma":[0.9998759,0.00001726236,0.00005048933,0.00002010195,0.00002593432,0.000010215],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001516133,0.00001085838,0.0001828385,0.00007383813,0.000005903454,0.0001076083,0.00003262786,0.0001490279,0.9938216,0.0007911547,0.000148715,0.004660556],"study_design_scores_gemma":[0.00001702013,0.0002081452,0.002171098,0.000009875081,0.00002033463,0.0005522099,0.00002236234,0.004042193,0.9834543,0.0001561181,0.009328818,0.00001759282],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7958753,0.003961915,0.1855766,0.0006212026,0.0007437012,0.0003599059,0.000373486,0.001354777,0.01113308],"genre_scores_gemma":[0.7677486,0.001112517,0.2241551,0.00007198531,0.00008880442,0.0001808772,0.0001714725,0.00005233019,0.006418401],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0009733676,"threshold_uncertainty_score":0.003984809,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02060411552801483,"score_gpt":0.2312636721964135,"score_spread":0.2106595566683987,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}