{"id":"W2321148428","doi":"10.1149/1.2980006","title":"Atomic Layer Deposited IrO2-TiO2 Thin Film Resistor for the Thermal Inkjet Printheads","year":2008,"lang":"en","type":"article","venue":"ECS Transactions","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Kootenay Association for Science & Technology","funders":"","keywords":"Thin film; Materials science; Atomic layer deposition; Annealing (glass); Temperature coefficient; Electrical resistivity and conductivity; Titanium; Layer (electronics); Analytical Chemistry (journal); Nanotechnology; Composite material; Metallurgy; Chemistry; Electrical engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001213827,0.0002785595,0.0002883254,0.0002049604,0.0001603908,0.0003602174,0.0006785961,0.0003280587,0.005264577],"category_scores_gemma":[0.0002931643,0.0002261228,0.0001871953,0.0002032794,0.0001280675,0.0004045503,0.0001828311,0.0005022853,0.001728234],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002725753,"about_ca_system_score_gemma":0.0001380828,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0002495371,"about_ca_topic_score_gemma":0.0007694062,"domain_scores_codex":[0.9998013,0.000009042219,0.000007560102,0.00004811632,0.0001148443,0.0000191641],"domain_scores_gemma":[0.9998891,0.00001849774,0.00001499694,0.00003481059,0.00003278046,0.000009726268],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002772081,0.00001241922,0.00007388056,0.0000614929,0.000003922194,0.00008033338,0.00001174301,0.0001687222,0.9941074,0.0003033543,0.000539374,0.004609697],"study_design_scores_gemma":[0.00001141626,0.00005953062,0.0009723007,0.000005486407,0.00001028248,0.0001862714,0.000009908844,0.003259802,0.9866381,0.00006229101,0.008776553,0.000008213318],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.7530661,0.004084555,0.1491135,0.0006622229,0.001296654,0.0003134808,0.00190534,0.006506164,0.08305193],"genre_scores_gemma":[0.8923407,0.0008979565,0.06596579,0.0001561346,0.00009248808,0.0001160077,0.0004959109,0.0002926514,0.03964249],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.005264577,"threshold_uncertainty_score":0.0176118,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02499284926741706,"score_gpt":0.2232771251969058,"score_spread":0.1982842759294887,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}