{"id":"W2321665917","doi":"10.1149/ma2013-01/18/793","title":"(Invited) Doping Silicon Dielectrics with Silicon, Cerium and Oxygen Via Ion Implantation","year":2013,"lang":"en","type":"article","venue":"ECS Meeting Abstracts","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"McMaster University","funders":"","keywords":"Cerium; Silicon; Doping; Materials science; Dielectric; Oxygen; Optoelectronics; Ion implantation; Ion; Engineering physics; Nanotechnology; Inorganic chemistry; Metallurgy; Chemistry; Engineering; Organic chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0005740047,0.0009225216,0.0006481712,0.0004917069,0.0008815823,0.0009808256,0.0007977742,0.001897266,0.04503856],"category_scores_gemma":[0.0007413148,0.0003005126,0.0008473255,0.0003229044,0.0004169911,0.0008555496,0.0007854481,0.001262612,0.01600173],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0004276394,"about_ca_system_score_gemma":0.0004541217,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001571756,"about_ca_topic_score_gemma":0.003861045,"domain_scores_codex":[0.9996654,0.00002505556,0.00001164836,0.00008410137,0.0001384122,0.0000753874],"domain_scores_gemma":[0.9997119,0.00006433814,0.00001935529,0.00001346794,0.0001282603,0.00006273387],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"not_applicable","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.001630632,0.0001130308,0.0004824524,0.001476536,0.0001001381,0.0009251537,0.0002770954,0.0005221583,0.1454692,0.00337848,0.7523073,0.09331776],"study_design_scores_gemma":[0.0001466638,0.0004744889,0.003722681,0.0001575104,0.0001490424,0.0005830125,0.0005094517,0.0008273127,0.07025684,0.001836501,0.9212629,0.00007355447],"study_design_candidate":"bench_or_experimental","study_design_consensus":null,"genre_codex":"editorial","genre_gemma":"empirical","genre_scores_codex":[0.0618094,0.1061555,0.01979249,0.07468384,0.4256338,0.001051228,0.003872341,0.002202264,0.3047992],"genre_scores_gemma":[0.1000752,0.03137543,0.007641429,0.01071058,0.03800411,0.0004561714,0.001956756,0.0004221008,0.8093582],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.04503856,"threshold_uncertainty_score":0.150669,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008614545299529347,"score_gpt":0.1987324039122127,"score_spread":0.1901178586126834,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}