{"id":"W2322175827","doi":"10.1149/1.3633654","title":"(Invited) ALD and AVD Grown Perovskite-type Dielectrics for Metal-Insulator-Metal Applications","year":2011,"lang":"en","type":"article","venue":"ECS Transactions","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":true,"ca_institutions":"Infineon Technologies (Canada)","funders":"","keywords":"Materials science; Dielectric; Atomic layer deposition; Metal-insulator-metal; Capacitor; High-κ dielectric; Amorphous solid; Tin; Thin film; Metal; Analytical Chemistry (journal); Chemical vapor deposition; Insulator (electricity); Electrode; Optoelectronics; Nanotechnology; Crystallography; Metallurgy; Chemistry; Electrical engineering; Physical chemistry; Voltage","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00006750548,0.0001414173,0.0001605731,0.00009640824,0.0001405529,0.00003258123,0.00008150109,0.00008850773,0.0001605617],"category_scores_gemma":[0.000004687415,0.0001411828,0.0000647137,0.0002160494,0.00002962802,0.0001978282,0.000002284688,0.0000867673,0.00001786175],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00001793267,"about_ca_system_score_gemma":0.000006644408,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00003233077,"about_ca_topic_score_gemma":0.00002522339,"domain_scores_codex":[0.9993804,0.000008671583,0.0001812944,0.0001706924,0.00006269498,0.0001962184],"domain_scores_gemma":[0.9996321,0.00004827759,0.00002112594,0.0001711838,0.00004565528,0.00008170083],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004299315,0.0002023089,0.0001668072,0.0003487459,0.0004839389,0.000001471584,0.001735131,0.0008127768,0.986156,0.001960471,0.0009264036,0.007162989],"study_design_scores_gemma":[0.001405066,0.0002959509,0.004201347,0.00002906072,0.0008852367,0.0000639775,0.0004146107,0.01368658,0.6861564,0.003999342,0.2876266,0.001235871],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8035764,0.003301895,0.1884722,0.0001032956,0.001081787,0.0008610974,0.0001939253,0.000744008,0.001665439],"genre_scores_gemma":[0.9956636,0.0003231384,0.003527929,0.00007446574,0.00009008457,0.0001891908,0.00002040941,0.00004124227,0.00006993887],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.2999996,"threshold_uncertainty_score":0.5757267,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02658076379519969,"score_gpt":0.2132244637482082,"score_spread":0.1866436999530085,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}