{"id":"W2322418826","doi":"10.1115/imece2009-12790","title":"Design and Modelling of a MEMS Capacitive Temperature Sensor With Linear Capacitance-Temperature Response","year":2009,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":5,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Waterloo","funders":"","keywords":"Capacitive sensing; Capacitance; Materials science; Linearity; Sensitivity (control systems); Finite element method; Temperature measurement; Microelectromechanical systems; Compensation (psychology); Electrode; Fabrication; Actuator; Electronic engineering; Optoelectronics; Electrical engineering; Engineering; Structural engineering","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0003390864,0.0008550399,0.001094267,0.000414314,0.0005155698,0.001058708,0.002338683,0.002166545,0.002986565],"category_scores_gemma":[0.0004670083,0.0008295544,0.00088579,0.0004755492,0.0005229249,0.001009078,0.0004795036,0.0005441025,0.00138898],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0008770303,"about_ca_system_score_gemma":0.001037981,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.002534545,"about_ca_topic_score_gemma":0.001432278,"domain_scores_codex":[0.999416,0.00006934988,0.0000285686,0.0001283567,0.0003164083,0.00004132179],"domain_scores_gemma":[0.9998149,0.00005088581,0.00004222056,0.00002005035,0.00005924339,0.00001276928],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"simulation_or_modeling","study_design_gemma":"simulation_or_modeling","study_design_scores_codex":[0.0001896877,0.00009394279,0.0009499801,0.0009683297,0.00009644787,0.0006233914,0.000207863,0.7712557,0.1831991,0.0142358,0.001810972,0.0263687],"study_design_scores_gemma":[0.0000276449,0.0002030132,0.0004358676,0.00002819897,0.00003901,0.0002740405,0.00001904133,0.9694438,0.0213209,0.000949204,0.007228384,0.00003091786],"study_design_candidate":"simulation_or_modeling","study_design_consensus":"simulation_or_modeling","genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.02737294,0.0009115224,0.9542964,0.0003660498,0.0001416597,0.0002747064,0.0005753005,0.001551337,0.01451012],"genre_scores_gemma":[0.6360329,0.001890284,0.3353125,0.0002219107,0.00007626326,0.001190033,0.000583548,0.0002408869,0.02445149],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.002986565,"threshold_uncertainty_score":0.00999099,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01598619324108242,"score_gpt":0.2080490601121125,"score_spread":0.1920628668710301,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}