{"id":"W2324455340","doi":"10.1149/06411.0199ecst","title":"A New Method to Increase the Doping Efficiency of Proton Implantation in a High-Dose Regime","year":2014,"lang":"en","type":"article","venue":"ECS Transactions","topic":"Silicon and Solar Cell Technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Infineon Technologies (Canada)","funders":"","keywords":"Passivation; Annealing (glass); Materials science; Proton; Hydrogen; Doping; Silicon; Optoelectronics; Analytical Chemistry (journal); Nanotechnology; Composite material; Chemistry; Nuclear physics; Environmental chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001921899,0.00006798646,0.00009930872,0.0001346663,0.00003754847,0.00001072713,0.0001122071,0.00005201188,0.00002465854],"category_scores_gemma":[0.00002115128,0.00005514692,0.00003136209,0.0003422547,0.00001053566,0.00005158844,0.000002633831,0.0001331555,0.000009700417],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00002372683,"about_ca_system_score_gemma":0.00001409627,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0005661247,"about_ca_topic_score_gemma":0.0001991168,"domain_scores_codex":[0.9995567,0.00003709069,0.0001404384,0.00008657611,0.00006454567,0.0001146026],"domain_scores_gemma":[0.9996783,0.00009768747,0.0000139763,0.0001714345,0.000008306133,0.00003036778],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"simulation_or_modeling","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00007935458,0.0001196928,0.000798937,0.0002859367,0.00006267636,0.000003971697,0.006512472,0.4097569,0.2725902,0.005249931,0.0002487373,0.3042912],"study_design_scores_gemma":[0.00192739,0.0002276437,0.01728696,0.0001840356,0.00006706102,0.00003717644,0.001158427,0.1282533,0.8371492,0.002411475,0.0108255,0.0004718236],"study_design_candidate":"bench_or_experimental","study_design_consensus":null,"genre_codex":"methods","genre_gemma":"empirical","genre_scores_codex":[0.3400617,0.0000233578,0.6585808,0.0001845026,0.00005181928,0.0003025731,0.000001873094,0.0001604777,0.0006328774],"genre_scores_gemma":[0.9826617,0.00001456617,0.01714759,0.00001843183,0.00001103474,0.00007956368,8.217868e-7,0.000009923829,0.00005633264],"genre_candidate":"empirical","genre_consensus":null,"teacher_disagreement_score":0.6426,"threshold_uncertainty_score":0.2248826,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.009621400191700089,"score_gpt":0.2521008443330373,"score_spread":0.2424794441413372,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}