{"id":"W2324784691","doi":"10.1149/1.3485682","title":"The Impact of Helium Co-Implantation on Hydrogen Induced Donor Profiles in Float Zone Silicon","year":2010,"lang":"en","type":"article","venue":"ECS Transactions","topic":"Silicon and Solar Cell Technologies","field":"Engineering","cited_by":3,"is_retracted":false,"has_abstract":true,"ca_institutions":"Infineon Technologies (Canada)","funders":"","keywords":"Annealing (glass); Fluence; Irradiation; Hydrogen; Helium; Wafer; Proton; Materials science; Doping; Silicon; Radiation damage; Analytical Chemistry (journal); Ion implantation; Radiochemistry; Atomic physics; Chemistry; Optoelectronics; Ion; Composite material; Nuclear physics; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00008388887,0.0001013144,0.000107036,0.0001200804,0.00007466994,0.00001662774,0.0001150992,0.0001296608,0.00005084045],"category_scores_gemma":[0.00001081733,0.0000754194,0.00007458853,0.0001739982,0.00004015449,0.00007378765,0.000001259438,0.0003776541,0.00002508868],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00003396163,"about_ca_system_score_gemma":0.00001897506,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0001355454,"about_ca_topic_score_gemma":0.0006664589,"domain_scores_codex":[0.9995094,0.00001324317,0.000161408,0.0000871595,0.00007099982,0.0001577817],"domain_scores_gemma":[0.9996418,0.0000919126,0.00002015553,0.0002078312,0.00001169879,0.00002656521],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001652523,0.00004486484,0.001083916,0.00001030816,0.0000359707,0.000001083113,0.0003504525,0.009806938,0.9777128,0.00007849992,0.00002999964,0.01082871],"study_design_scores_gemma":[0.0003018852,0.00007878361,0.02345373,0.000009327174,0.000007258684,0.000006685352,0.0002719719,0.007990117,0.9675246,0.00006632999,0.0001859818,0.0001033397],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9977544,0.00002896597,0.0004338911,0.00004853247,0.0001782739,0.0001915556,0.00002762517,0.0002247315,0.001112029],"genre_scores_gemma":[0.9997613,0.00008451,0.00004005823,0.000002525812,0.00001606971,0.00004292977,0.00000596634,0.00001541983,0.00003125947],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.02236981,"threshold_uncertainty_score":0.3075514,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01263995332242438,"score_gpt":0.2573896697075742,"score_spread":0.2447497163851498,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}