{"id":"W2324919773","doi":"10.1149/1.3483522","title":"Surface and Interface Characterization of Sequentially Plasma Activated Silicon, Silicon dioxide and Germanium Wafers for Low Temperature Bonding Applications","year":2010,"lang":"en","type":"article","venue":"ECS Transactions","topic":"3D IC and TSV technologies","field":"Engineering","cited_by":20,"is_retracted":false,"has_abstract":true,"ca_institutions":"McMaster University","funders":"","keywords":"Germanium; Wafer; Materials science; Silicon; Reactivity (psychology); Surface roughness; Silicon dioxide; Plasma activation; Plasma; Characterization (materials science); Nanotechnology; Analytical Chemistry (journal); Composite material; Chemistry; Optoelectronics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001039687,0.000281954,0.0001754817,0.0002671464,0.0001840702,0.0002010649,0.0002014022,0.0003006384,0.0014371],"category_scores_gemma":[0.0002312708,0.0002015684,0.0002126196,0.0001779424,0.0001362589,0.0001903963,0.0001534422,0.0002312419,0.0002545466],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001339352,"about_ca_system_score_gemma":0.0001196782,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00072713,"about_ca_topic_score_gemma":0.001019992,"domain_scores_codex":[0.9999114,0.000006940236,0.000004010416,0.00001845805,0.000044564,0.00001451073],"domain_scores_gemma":[0.9999129,0.00002167381,0.00001451297,0.000009057988,0.00003118356,0.00001061783],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002081069,0.000003551824,0.0001639856,0.00001646217,0.000002541419,0.00001584261,0.00001199059,0.0000385336,0.9991295,0.00001363877,0.00002054898,0.0005627007],"study_design_scores_gemma":[0.000007190194,0.0003152754,0.01502822,0.000003366093,0.00002351764,0.0001762803,0.0000633352,0.001857073,0.9813517,0.0000293919,0.001136955,0.000007752944],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9954087,0.0005556104,0.002766178,0.00002763491,0.00001605779,0.00001705651,0.0002079792,0.00003466016,0.000966154],"genre_scores_gemma":[0.9940785,0.0003103286,0.003668794,0.00002171195,0.000008344551,0.00004511921,0.0003809326,0.0000243962,0.001461861],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0014371,"threshold_uncertainty_score":0.004807591,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005851483857038826,"score_gpt":0.2101241962603762,"score_spread":0.2042727124033374,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}