{"id":"W2325361840","doi":"10.1149/1.2357270","title":"Exposure of Thick Polymethylglutarimide Films for Structural MEMS","year":2006,"lang":"en","type":"article","venue":"ECS Transactions","topic":"Silicone and Siloxane Chemistry","field":"Materials Science","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"Simon Fraser University","funders":"","keywords":"Resist; Materials science; Microelectromechanical systems; Bilayer; Nanotechnology; Composite material; Optoelectronics; Membrane; Chemistry; Layer (electronics)","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["insufficient_payload"],"consensus_categories":[],"category_scores_codex":[0.00008874332,0.0001022793,0.0001586471,0.00003023348,0.0001338408,0.00002082946,0.0001321406,0.00009188706,0.001323057],"category_scores_gemma":[0.000007861123,0.00009387624,0.0001186384,0.00008377985,0.0000852277,0.000109103,0.000002390239,0.00007409442,0.00001000916],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0000130061,"about_ca_system_score_gemma":0.00004874029,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0003779199,"about_ca_topic_score_gemma":0.00006463977,"domain_scores_codex":[0.9992515,0.00001083493,0.0002427513,0.000179561,0.0001252426,0.0001900597],"domain_scores_gemma":[0.9995427,0.00009782785,0.00006380158,0.0002022355,0.00005504217,0.00003844325],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00002252511,0.00002518155,0.0001166947,0.00003578902,0.000006479918,4.843657e-7,0.0001235913,0.001002666,0.9980796,0.00008587183,0.0003094089,0.0001917353],"study_design_scores_gemma":[0.0003673775,0.00003528621,0.000885721,0.000007416411,0.00003435215,0.000009509106,0.0001582093,0.00007997757,0.9971837,0.0007537121,0.0003779171,0.0001068345],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9914293,0.0002476217,0.006717026,0.0001210594,0.0003264379,0.0001214667,0.0002012853,0.00006148867,0.0007743196],"genre_scores_gemma":[0.9958443,0.000003096432,0.003088263,0.0000236385,0.0000847139,0.00002689999,0.00001666701,0.00001238169,0.0009000147],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.004415031,"threshold_uncertainty_score":0.9995899,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01173031607659409,"score_gpt":0.2381298335314802,"score_spread":0.2263995174548861,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}