{"id":"W2326229569","doi":"10.1557/proc-0990-b04-08","title":"A Low Temperature Photonic Crystal Technology for Integration with Modern CMOS Technologies","year":2007,"lang":"en","type":"article","venue":"MRS Proceedings","topic":"Photonic Crystals and Applications","field":"Physics and Astronomy","cited_by":0,"is_retracted":false,"has_abstract":false,"ca_institutions":"University of Waterloo","funders":"","keywords":"Materials science; Plasma-enhanced chemical vapor deposition; Optoelectronics; Refractive index; Chemical vapor deposition; Cladding (metalworking); Photonic crystal; Amorphous solid; Silicon oxynitride; Thin film; Silicon; Silane; Nanotechnology; Silicon nitride; Composite material; Crystallography","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001175201,0.0001844875,0.0001735534,0.0001473608,0.0002095985,0.00007654192,0.0002240335,0.0001325254,0.00001509719],"category_scores_gemma":[0.000008250575,0.0001441468,0.00005594885,0.0004699566,0.0001184931,0.0001534401,0.00004512954,0.0002498542,0.000003072916],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00004284493,"about_ca_system_score_gemma":0.00004776012,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000008429962,"about_ca_topic_score_gemma":0.00001009807,"domain_scores_codex":[0.9990216,5.239743e-7,0.0001843333,0.0003371926,0.000102263,0.0003541052],"domain_scores_gemma":[0.9994925,0.0000160912,0.0001125598,0.0001353949,0.000208827,0.00003464558],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005393893,0.0001318584,0.001219181,0.0000284723,0.00003580666,3.145907e-7,0.0003082764,0.000003353364,0.9049697,0.06916793,0.000487828,0.02359334],"study_design_scores_gemma":[0.0006450771,0.0001714527,0.000084137,0.00008288164,0.00002810066,0.000006633255,0.00667864,0.0009330596,0.9379622,0.04590186,0.00722869,0.0002773016],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.967935,0.00004865706,0.02651039,0.0007445196,0.00002030151,0.0008743841,0.00003771634,0.0004117997,0.003417211],"genre_scores_gemma":[0.9940192,0.000002361644,0.004966595,0.00002408969,0.00005815648,0.0005888725,0.0000283868,0.00002755721,0.0002848214],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.03299247,"threshold_uncertainty_score":0.5878137,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.005347030472793962,"score_gpt":0.2324886624195079,"score_spread":0.2271416319467139,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}