{"id":"W2326569353","doi":"10.1557/proc-808-a4.14","title":"Intrinsic and Doped m c-Si:H TFT Layers using 13.56 MHz PECVD at 250°C","year":2004,"lang":"en","type":"article","venue":"MRS Proceedings","topic":"Thin-Film Transistor Technologies","field":"Engineering","cited_by":1,"is_retracted":false,"has_abstract":false,"ca_institutions":"University of Waterloo","funders":"Natural Sciences and Engineering Research Council of Canada; University of Waterloo","keywords":"Materials science; Plasma-enhanced chemical vapor deposition; Thin-film transistor; Silane; Crystallinity; Analytical Chemistry (journal); Chemical vapor deposition; Amorphous solid; Conductivity; Doping; Silicon; Threshold voltage; Thin film; Layer (electronics); Optoelectronics; Nanotechnology; Transistor; Crystallography; Composite material; Electrical engineering; Chemistry; Voltage","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001636504,0.0003787998,0.000328485,0.000214462,0.0006534344,0.0004530136,0.0004070472,0.0004925735,0.002540872],"category_scores_gemma":[0.000297817,0.0002303487,0.0001658429,0.0004481304,0.0003111369,0.0004051989,0.0001502592,0.0006143783,0.0005406013],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0006758468,"about_ca_system_score_gemma":0.0003222493,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.004992646,"about_ca_topic_score_gemma":0.01030281,"domain_scores_codex":[0.9998206,0.00000869102,0.000007163922,0.00006230166,0.00003688222,0.00006436896],"domain_scores_gemma":[0.9998916,0.00003445805,0.00001062112,0.00001779518,0.00003729799,0.000008153139],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001452141,0.00001746373,0.0002573501,0.00004041581,0.00001217912,0.0000712621,0.0000905301,0.0001229497,0.9970601,0.0001964327,0.0002134486,0.001772568],"study_design_scores_gemma":[0.000009165426,0.00006332665,0.001362203,0.00000557806,0.00001492926,0.0001006507,0.00003952535,0.001119353,0.9953405,0.00006328747,0.001876038,0.000005489213],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9773817,0.0009963925,0.01144028,0.0001750646,0.0001329609,0.00003983455,0.0008411141,0.0002556827,0.008736966],"genre_scores_gemma":[0.9826879,0.0006024936,0.007479681,0.00005741645,0.00002853837,0.00003571885,0.0009312741,0.0001177411,0.008059307],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.004992646,"threshold_uncertainty_score":0.009927154,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01274685681001908,"score_gpt":0.2011261769283089,"score_spread":0.1883793201182899,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}