{"id":"W2327253767","doi":"10.1557/proc-617-j3.7","title":"Optical Properties Of Tantalum Oxide Films Deposited On BK7 Substrates By Excimer Laser Ablation","year":2000,"lang":"en","type":"article","venue":"MRS Proceedings","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":7,"is_retracted":false,"has_abstract":false,"ca_institutions":"National Research Council Canada","funders":"","keywords":"Materials science; Tantalum; Torr; Excimer laser; Transmittance; Laser ablation; Suboxide; Pulsed laser deposition; Analytical Chemistry (journal); Thin film; Band gap; Photon energy; Optics; Laser; Optoelectronics; Nanotechnology; Silicon; Photon","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001060936,0.000190207,0.000215159,0.0002673602,0.0002213332,0.0004059202,0.0002865335,0.0002859165,0.002114006],"category_scores_gemma":[0.0003138136,0.000183643,0.0001180089,0.0002599499,0.0001498607,0.0002274767,0.0001154357,0.0002830977,0.0004237056],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000249915,"about_ca_system_score_gemma":0.000151105,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001921924,"about_ca_topic_score_gemma":0.002054121,"domain_scores_codex":[0.9999037,0.000004794293,0.000006038873,0.00001571799,0.00003566905,0.00003412151],"domain_scores_gemma":[0.9997647,0.00007601239,0.0000531727,0.0000175895,0.00006525588,0.00002321003],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001699253,0.000009405072,0.0003148698,0.00003373528,0.000004856016,0.00005742129,0.00003269402,0.00006604223,0.9987852,0.00003405079,0.00004366799,0.0004481098],"study_design_scores_gemma":[0.00001774328,0.0001807551,0.01695191,0.000008109671,0.00002327062,0.00007709432,0.0001122172,0.00093565,0.9810277,0.00001932639,0.0006383464,0.000007806526],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9982039,0.0002381628,0.0001400921,0.00001548952,0.000007867189,0.000002557134,0.0001270467,0.00001490178,0.001250001],"genre_scores_gemma":[0.9977107,0.0001978395,0.000259019,0.00001171935,0.000003983472,0.000004177399,0.0002523997,0.00001458798,0.001545597],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002114006,"threshold_uncertainty_score":0.007072031,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01061682035249411,"score_gpt":0.1878903237032293,"score_spread":0.1772735033507352,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}