{"id":"W2328365790","doi":"10.1557/proc-1153-a07-17","title":"Passivation of Silicon Surfaces Using Atomic Layer Deposited Metal Oxides","year":2009,"lang":"en","type":"article","venue":"MRS Proceedings","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":8,"is_retracted":false,"has_abstract":false,"ca_institutions":"University of Waterloo","funders":"University of Minnesota","keywords":"Passivation; Materials science; Atomic layer deposition; Layer (electronics); Dielectric; Silicon; Oxide; Metal; Carrier lifetime; Analytical Chemistry (journal); Optoelectronics; Nanotechnology; Metallurgy; Chemistry","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00007468171,0.0001135927,0.0001740591,0.00007754195,0.00002812601,0.00004996848,0.00007838713,0.00006714849,0.00002846558],"category_scores_gemma":[0.00001435141,0.0001078427,0.00003443978,0.0001562663,0.00001391964,0.0003309494,0.000008835993,0.00004369633,0.000003802367],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00002688598,"about_ca_system_score_gemma":0.000005062793,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00003383601,"about_ca_topic_score_gemma":8.543893e-7,"domain_scores_codex":[0.999418,0.000002021955,0.000216279,0.000111693,0.0001061661,0.0001458581],"domain_scores_gemma":[0.9997906,0.000008681169,0.00006321335,0.00004302134,0.00006367879,0.00003077607],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.000006111635,0.000008265316,0.003584117,0.00006895485,0.0000167581,2.823313e-7,0.0002181865,0.0002398472,0.9954512,0.0001861505,0.00008014188,0.0001400028],"study_design_scores_gemma":[0.0001367096,0.00002328606,0.01115628,0.00004624665,0.00002496963,0.000005610343,0.0001077867,0.008668889,0.9794074,0.0002267492,0.00007285018,0.0001231803],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9986796,0.0002932551,0.00001386958,0.00001619755,0.0001283221,0.00007603005,0.000002319178,0.0001758077,0.0006145726],"genre_scores_gemma":[0.9992751,0.00001632058,0.0005918915,0.00003110421,0.00005888727,0.000001643097,0.000002685739,0.00001642792,0.00000597697],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.01604374,"threshold_uncertainty_score":0.4397696,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.02071839180503942,"score_gpt":0.2348758806004926,"score_spread":0.2141574887954531,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}