{"id":"W2329051939","doi":"10.1088/0268-1242/31/5/055008","title":"On the origins of near-surface stresses in silicon around Cu-filled and CNT-filled through silicon vias","year":2016,"lang":"en","type":"article","venue":"Semiconductor Science and Technology","topic":"3D IC and TSV technologies","field":"Engineering","cited_by":7,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of British Columbia","funders":"Natural Sciences and Engineering Research Council of Canada; Agency for Science, Technology and Research","keywords":"Materials science; Stress (linguistics); Silicon; Composite material; Thermal expansion; Through-silicon via; Raman spectroscopy; Compressive strength; Work (physics); Oxide; Carbon nanotube; Metallurgy; Optics; Mechanical engineering","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00007386589,0.0001782978,0.0001407902,0.00026127,0.0001751375,0.0002439407,0.00014979,0.0001745443,0.0005490473],"category_scores_gemma":[0.0001671872,0.0001345052,0.0001321512,0.0001579475,0.0004359214,0.0002855797,0.0001535305,0.0001513653,0.00009900968],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002122353,"about_ca_system_score_gemma":0.0001305439,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0009319822,"about_ca_topic_score_gemma":0.001794402,"domain_scores_codex":[0.9999272,0.000004251247,0.000002835395,0.00002032773,0.00002861038,0.0000168262],"domain_scores_gemma":[0.9998282,0.0000339727,0.00005179708,0.00001425306,0.00005299635,0.00001866868],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00005523034,0.000008014052,0.00183688,0.00002351896,0.000006085837,0.0001119075,0.0001506372,0.0008987171,0.9949051,0.000221187,0.00002034675,0.001762403],"study_design_scores_gemma":[0.000007561933,0.0002541445,0.04740116,0.00001375963,0.00002055258,0.0002809627,0.000489454,0.01154346,0.9387875,0.0002907111,0.0008862001,0.000024443],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9982516,0.0001478413,0.001205822,0.000009018273,0.000004788258,0.000002985106,0.00003202156,0.00001688211,0.0003289914],"genre_scores_gemma":[0.9993688,0.00006320612,0.0003861475,0.000002655216,0.000001780047,0.000002748831,0.000023273,0.000003237222,0.0001480488],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0009319822,"threshold_uncertainty_score":0.001853108,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01661917740224418,"score_gpt":0.2387265185882955,"score_spread":0.2221073411860513,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}