{"id":"W2329453247","doi":"10.1149/05005.0115ecst","title":"Investigation of Doping Type Conversion and Diffusion Length Extraction of Proton Implanted Silicon by EBIC","year":2013,"lang":"en","type":"article","venue":"ECS Transactions","topic":"Silicon and Solar Cell Technologies","field":"Engineering","cited_by":2,"is_retracted":false,"has_abstract":true,"ca_institutions":"Infineon Technologies (Canada)","funders":"","keywords":"Doping; Materials science; Electron beam-induced current; Wafer; Diffusion; Silicon; Proton; Ion implantation; Optoelectronics; Analytical Chemistry (journal); Chemistry; Ion; Physics; Nuclear physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0002019961,0.0002960446,0.0002287526,0.0003822801,0.0001439324,0.0002615457,0.000281083,0.0003889645,0.0005923081],"category_scores_gemma":[0.0004591673,0.0002179761,0.0001169646,0.0003898047,0.0002326726,0.0003330904,0.0001232736,0.0002907252,0.0001882623],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003291122,"about_ca_system_score_gemma":0.0001434491,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.001291215,"about_ca_topic_score_gemma":0.002225234,"domain_scores_codex":[0.9998529,0.0000118528,0.000008497694,0.00003994716,0.00006748864,0.00001931291],"domain_scores_gemma":[0.9997336,0.00007617374,0.00005817058,0.00002370902,0.00009890317,0.000009430897],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00004301589,0.000005448761,0.0005593498,0.0000327938,0.000003701772,0.00003012677,0.00002946758,0.0001288213,0.9975966,0.00004869869,0.00002083567,0.001501203],"study_design_scores_gemma":[0.000005019777,0.00006012796,0.007299385,0.000006221244,0.00001196658,0.00006909343,0.00002670351,0.002130946,0.9896443,0.00002724297,0.0007131433,0.000005766328],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9892154,0.001091852,0.006736939,0.00005185636,0.00001410157,0.00002055193,0.0005082193,0.00008132764,0.002279682],"genre_scores_gemma":[0.9879465,0.0008732196,0.008663436,0.00003732154,0.00000803064,0.00002725954,0.0003731458,0.00004266047,0.002028564],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001291215,"threshold_uncertainty_score":0.00256741,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01041160530557832,"score_gpt":0.19993439343457,"score_spread":0.1895227881289916,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}