{"id":"W2332051722","doi":"10.1149/1.2357070","title":"Sequential Plasma Activated Process for Silicon Direct Bonding","year":2006,"lang":"en","type":"article","venue":"ECS Transactions","topic":"3D IC and TSV technologies","field":"Engineering","cited_by":25,"is_retracted":false,"has_abstract":true,"ca_institutions":"McMaster University","funders":"McMaster University","keywords":"Plasma activation; Silicon oxide; Silicon; Materials science; Anodic bonding; Ultimate tensile strength; Composite material; Surface roughness; Annealing (glass); High-resolution transmission electron microscopy; Chemistry; Wafer; Plasma; Chemical engineering; Nanotechnology; Transmission electron microscopy; Metallurgy; Silicon nitride","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0001165596,0.0003928433,0.0002942476,0.0002263994,0.0002194396,0.000213394,0.000514949,0.0002962606,0.003012893],"category_scores_gemma":[0.0001834273,0.0003385207,0.0002570738,0.0002515516,0.000177312,0.000295506,0.0004102435,0.0005479442,0.001133232],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.000244615,"about_ca_system_score_gemma":0.0002972568,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.0004903892,"about_ca_topic_score_gemma":0.0007780938,"domain_scores_codex":[0.9998294,0.00001075863,0.000006359705,0.00004138645,0.0000927449,0.0000194024],"domain_scores_gemma":[0.9999083,0.00001467175,0.00001696452,0.00001834137,0.0000325302,0.000009204537],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003761832,0.00001677697,0.0001307857,0.000114838,0.000006442902,0.00004629047,0.0000252522,0.0002504333,0.9852735,0.0006574493,0.0005349841,0.01290571],"study_design_scores_gemma":[0.00002675472,0.0003461736,0.001157641,0.000007533357,0.0000177985,0.0007565106,0.00001390855,0.006466677,0.9712351,0.0002966347,0.01965971,0.00001547804],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.681609,0.004674031,0.2861851,0.0003328522,0.0004395283,0.0004413299,0.0007350397,0.00230247,0.02328067],"genre_scores_gemma":[0.8625065,0.001289297,0.1218649,0.000112132,0.0000503129,0.0002936309,0.0005854659,0.0001315728,0.01316616],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.003012893,"threshold_uncertainty_score":0.01007915,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01449991768443569,"score_gpt":0.2332446222743863,"score_spread":0.2187447045899506,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}