{"id":"W2332051722","doi":"10.1149/1.2357070","title":"Sequential Plasma Activated Process for Silicon Direct Bonding","year":2006,"lang":"en","type":"article","venue":"ECS Transactions","topic":"3D IC and TSV technologies","field":"Engineering","cited_by":25,"is_retracted":false,"has_abstract":true,"ca_institutions":"McMaster University","funders":"McMaster University","keywords":"Plasma activation; Silicon oxide; Silicon; Materials science; Anodic bonding; Ultimate tensile strength; Composite material; Surface roughness; Annealing (glass); High-resolution transmission electron microscopy; Chemistry; Wafer; Plasma; Chemical engineering; Nanotechnology; Transmission electron microscopy; Metallurgy; Silicon nitride","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00002452889,0.0001046249,0.0001041495,0.00009076306,0.0001214244,0.00002096901,0.00007243081,0.0001017487,0.00004360986],"category_scores_gemma":[0.000003969645,0.0001085023,0.00006291429,0.0001801922,0.0000260404,0.000145681,8.950271e-7,0.0001143526,0.00000923881],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00004566029,"about_ca_system_score_gemma":0.0000105139,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001685209,"about_ca_topic_score_gemma":0.0000426377,"domain_scores_codex":[0.9995135,0.000002699723,0.0001154111,0.0001137635,0.00005650126,0.0001981093],"domain_scores_gemma":[0.9998245,0.0000344438,0.00001223068,0.00009217308,0.00001813082,0.00001855619],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003428175,0.0001220648,0.0001002297,0.0002597704,0.0001785175,0.000004592378,0.0002407913,0.3968999,0.5860776,0.001507574,0.00207529,0.01249941],"study_design_scores_gemma":[0.0003408346,0.00001992357,0.00008225358,0.00001545509,0.0000346918,0.000005305797,0.0001051941,0.02194296,0.9638299,0.0006855644,0.0127722,0.0001657089],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.8082443,0.00008818143,0.170612,0.0001513642,0.0004954331,0.0003361858,0.00007875628,0.003107114,0.01688666],"genre_scores_gemma":[0.9985784,0.000007237525,0.0004412881,0.000002168697,0.00005093004,0.0001242094,0.00001293377,0.00002832205,0.0007544526],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.3777524,"threshold_uncertainty_score":0.4424596,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01449991768443569,"score_gpt":0.2332446222743863,"score_spread":0.2187447045899506,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}