{"id":"W2333335717","doi":"10.1021/jp1073208","title":"Oxidation and Etching of CVD Diamond by Thermal and Hyperthermal Atomic Oxygen","year":2010,"lang":"en","type":"article","venue":"The Journal of Physical Chemistry C","topic":"Diamond and Carbon-based Materials Research","field":"Materials Science","cited_by":53,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Victoria","funders":"Division of Chemistry","keywords":"Diamond; Chemistry; Etching (microfabrication); Thermal desorption; Chemical vapor deposition; Oxygen; Adsorption; Chemical physics; Carbon fibers; Thermal oxidation; Electron energy loss spectroscopy; Hydrogen; Thermal; Desorption; Analytical Chemistry (journal); Nanotechnology; Chemical engineering; Layer (electronics); Materials science; Physical chemistry; Transmission electron microscopy; Composite material","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0005025799,0.00008333564,0.0001752937,0.000008810706,0.00005405562,0.00004563321,0.0001983162,0.00003905547,0.00008941985],"category_scores_gemma":[0.00005814354,0.00005028178,0.0000331495,0.00003058417,0.0002094035,0.0001282895,0.0000684017,0.0001922302,0.00000201477],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.00000559793,"about_ca_system_score_gemma":0.00003647331,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001767277,"about_ca_topic_score_gemma":4.336391e-7,"domain_scores_codex":[0.9993331,0.00005062186,0.0001769159,0.00007452913,0.0002316706,0.0001331729],"domain_scores_gemma":[0.999415,0.0001599282,0.0001700701,0.0001123569,0.00005852895,0.00008408818],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00008920678,0.00004826989,0.00005045158,0.00004308913,0.000006883613,0.000001082123,0.0002445937,0.000007171775,0.9986484,0.00001235872,0.00004347951,0.0008049923],"study_design_scores_gemma":[0.0002869744,0.0000429248,0.0006083545,0.00001731514,0.00002138612,0.00001978136,0.00006936897,0.0002298241,0.9983249,0.0002823319,0.00003996257,0.00005687391],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9994307,0.0001077077,0.00000613133,0.0001378762,0.00003590996,0.00003200046,0.0000117166,0.000003824464,0.0002341757],"genre_scores_gemma":[0.9996357,0.00001692083,0.00003119599,0.0000168818,0.0002611257,7.268579e-7,0.000001032274,0.000008323967,0.000028105],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.0007481184,"threshold_uncertainty_score":0.2050432,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.004924606346699598,"score_gpt":0.2320880167465279,"score_spread":0.2271634103998283,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}