{"id":"W2333335717","doi":"10.1021/jp1073208","title":"Oxidation and Etching of CVD Diamond by Thermal and Hyperthermal Atomic Oxygen","year":2010,"lang":"en","type":"article","venue":"The Journal of Physical Chemistry C","topic":"Diamond and Carbon-based Materials Research","field":"Materials Science","cited_by":53,"is_retracted":false,"has_abstract":true,"ca_institutions":"University of Victoria","funders":"Division of Chemistry","keywords":"Diamond; Chemistry; Etching (microfabrication); Thermal desorption; Chemical vapor deposition; Oxygen; Adsorption; Chemical physics; Carbon fibers; Thermal oxidation; Electron energy loss spectroscopy; Hydrogen; Thermal; Desorption; Analytical Chemistry (journal); Nanotechnology; Chemical engineering; Layer (electronics); Materials science; Physical chemistry; Transmission electron microscopy; Composite material","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.00005572018,0.000152999,0.0001910092,0.00007227185,0.0001545459,0.0001910735,0.0003230537,0.0002847027,0.0009396318],"category_scores_gemma":[0.000179355,0.0001626711,0.0001541849,0.00008753605,0.0001556068,0.0001400879,0.0001744013,0.000224735,0.00008657111],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0003029052,"about_ca_system_score_gemma":0.000163143,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.002092944,"about_ca_topic_score_gemma":0.002011368,"domain_scores_codex":[0.9999363,0.000002984281,0.000001940983,0.00001481368,0.00002414719,0.00001976827],"domain_scores_gemma":[0.9999601,0.00001367716,0.000008743069,0.000004746576,0.000007825988,0.000004920703],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.0001139988,0.00001569954,0.0009644687,0.00008750342,0.00001306585,0.0001405842,0.00008760763,0.004442293,0.9919127,0.0003334816,0.00007796384,0.001810579],"study_design_scores_gemma":[0.0000468248,0.0002834811,0.01030125,0.000008225194,0.0000172187,0.0001842063,0.0001670181,0.03787708,0.9479795,0.0003361318,0.002776588,0.00002251902],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9984148,0.000102833,0.0006673287,0.0000149667,0.000006474636,0.000004184655,0.00009280039,0.00001039291,0.0006862349],"genre_scores_gemma":[0.9977412,0.0001221726,0.001505392,0.000009098715,0.000001398673,0.00000667122,0.000103459,0.000007492627,0.0005030374],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.002092944,"threshold_uncertainty_score":0.004161537,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.004924606346699598,"score_gpt":0.2320880167465279,"score_spread":0.2271634103998283,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}