{"id":"W2333810935","doi":"10.1007/s00542-012-1491-3","title":"A passive mechanism for thermal stress regulation in micro-machined beam-type structures","year":2012,"lang":"en","type":"article","venue":"Microsystem Technologies","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":6,"is_retracted":false,"has_abstract":false,"ca_institutions":"University of Waterloo","funders":"CMC Microsystems","keywords":"Mechanism (biology); Beam (structure); Residual stress; Stress (linguistics); Finite element method; Thermal; Fabrication; Materials science; Structural engineering; Compliant mechanism; Electric field; Electrode; Mechanical engineering; Mechanics; Engineering; Composite material; Physics","routes":{"ca_aff":true,"ca_fund":true,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"codex-gemma-dda1882f352a","candidate_categories":["metaepi_narrow"],"consensus_categories":[],"category_scores_codex":[0.0000980133,0.0002869975,0.000332165,0.0002986921,0.0000950059,0.00003178661,0.000366671,0.0005315419,0.000003568212],"category_scores_gemma":[0.0001340246,0.0002484403,0.00006389114,0.0003189765,0.0000727091,0.0002450369,0.0001169728,0.0002836803,0.000006742603],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0001605954,"about_ca_system_score_gemma":0.000007617516,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00001390869,"about_ca_topic_score_gemma":0.00006116937,"domain_scores_codex":[0.9987509,0.000004749105,0.0003292972,0.0002352747,0.00009685037,0.0005829835],"domain_scores_gemma":[0.9993098,0.00007492428,0.00008795657,0.0004389491,0.00006716389,0.00002123391],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00001484002,0.00001504143,0.0003649461,0.0002145735,0.00002589357,0.000001446551,0.0001357112,0.0005517008,0.9782298,0.01091165,0.0001153597,0.009418991],"study_design_scores_gemma":[0.0003652634,0.00004439963,0.001458999,0.0001055388,0.00001073344,0.00001018797,0.001561118,0.0001878373,0.9814816,0.01397319,0.0004997646,0.0003013381],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9855028,0.002420988,0.006163113,0.0001066875,0.0005901426,0.0007859365,0.00009782897,0.004277443,0.00005506169],"genre_scores_gemma":[0.9867373,0.0001264723,0.01275476,0.000006649374,0.00004511054,0.0002024824,0.00002721287,0.00005515714,0.00004481485],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.009117654,"threshold_uncertainty_score":0.9999968,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.008530119412946395,"score_gpt":0.2227986993947916,"score_spread":0.2142685799818452,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}