{"id":"W2335507578","doi":"10.1115/imece2007-42556","title":"A Novel Highly Tunable Butterfly-Type MEMS Capacitor","year":2007,"lang":"en","type":"article","venue":"","topic":"Advanced MEMS and NEMS Technologies","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"Toronto Metropolitan University; University of Waterloo","funders":"","keywords":"Capacitor; Capacitance; Materials science; Microelectromechanical systems; Voltage; Resistive touchscreen; Nonlinear system; Resonator; Stiffness; Electronic engineering; Optoelectronics; Electrical engineering; Engineering; Physics; Electrode","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.0000472069,0.0001770896,0.0001584281,0.0001675663,0.0002678886,0.0003251989,0.0006492408,0.0005387279,0.001291262],"category_scores_gemma":[0.0000993475,0.0001124223,0.00012675,0.0003262332,0.0001833718,0.0003123411,0.00019587,0.0002317969,0.0003824343],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0002892284,"about_ca_system_score_gemma":0.0002904653,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.00100921,"about_ca_topic_score_gemma":0.002027949,"domain_scores_codex":[0.9999313,0.000003279367,0.000001795555,0.00001804986,0.0000336412,0.00001190185],"domain_scores_gemma":[0.9999325,0.000008385843,0.00001111612,0.00001010409,0.00001973234,0.00001810798],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00003157414,0.00001936715,0.00014394,0.00005755232,0.00001072958,0.0002791276,0.00002246112,0.002538313,0.9822948,0.00136803,0.001175992,0.01205804],"study_design_scores_gemma":[0.00005642242,0.0003754458,0.002302996,0.000008984257,0.00003093401,0.001350922,0.00004230751,0.06746911,0.896486,0.0006415416,0.03118146,0.00005388143],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.860693,0.001977919,0.09650488,0.001355126,0.0004841005,0.0001152185,0.0007067232,0.001679474,0.0364835],"genre_scores_gemma":[0.9326115,0.0005217448,0.05353678,0.0002211221,0.00006751443,0.00003371052,0.0002417111,0.00003832776,0.01272767],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001291262,"threshold_uncertainty_score":0.004319727,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01333029158187639,"score_gpt":0.2210733331969218,"score_spread":0.2077430416150454,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}