{"id":"W2342147393","doi":"10.1149/ma2016-01/42/2119","title":"Calibration of a Circular HV Magnetron Sputtering Source for in-Situ RE Doping of Ecr-PECVD Si-Based Thin Films","year":2016,"lang":"en","type":"article","venue":"ECS Meeting Abstracts","topic":"Semiconductor materials and devices","field":"Engineering","cited_by":0,"is_retracted":false,"has_abstract":true,"ca_institutions":"McMaster University","funders":"","keywords":"Plasma-enhanced chemical vapor deposition; Materials science; Sputter deposition; Doping; Silicon; Optoelectronics; Electron cyclotron resonance; Sputtering; Rutherford backscattering spectrometry; Chemical vapor deposition; Ellipsometry; Thin film; Nanotechnology; Plasma; Physics","routes":{"ca_aff":true,"ca_fund":false,"ca_venue":false,"about_ca":false,"invisible_to_affiliation_only":false},"retraction":null,"screen":null,"direct_labels":[],"prediction":{"model_version":"metacan-v3-hybrid-931329e0061c","candidate_categories":[],"consensus_categories":[],"category_scores_codex":[0.000705582,0.000631821,0.0003653348,0.0006381429,0.0003495739,0.0004172949,0.001073465,0.0007888945,0.001270876],"category_scores_gemma":[0.000840639,0.0004506147,0.000272268,0.0004296749,0.0003305956,0.000333025,0.0002872282,0.0004022244,0.0005878623],"about_ca_system_candidate":false,"about_ca_system_consensus":false,"about_ca_system_score_codex":0.0006246733,"about_ca_system_score_gemma":0.0002486001,"about_ca_topic_candidate":false,"about_ca_topic_consensus":false,"about_ca_topic_score_codex":0.000989691,"about_ca_topic_score_gemma":0.002591229,"domain_scores_codex":[0.9992287,0.000093806,0.00005095516,0.0002203352,0.0003598907,0.0000462743],"domain_scores_gemma":[0.999305,0.0001966659,0.0001318386,0.0001487679,0.0002014332,0.00001621658],"domain_codex":null,"domain_gemma":null,"domain_candidate":null,"domain_consensus":null,"study_design_codex":"bench_or_experimental","study_design_gemma":"bench_or_experimental","study_design_scores_codex":[0.00006563515,0.00002576395,0.0009903068,0.00007687113,0.00001061224,0.0000558582,0.0000602956,0.0002872841,0.9933276,0.00008560845,0.0001573239,0.004856766],"study_design_scores_gemma":[0.000004994193,0.0001013832,0.002683857,0.000007484413,0.00001043933,0.0001077819,0.00002792639,0.002918096,0.9928377,0.00001828529,0.001274603,0.000007514954],"study_design_candidate":"bench_or_experimental","study_design_consensus":"bench_or_experimental","genre_codex":"empirical","genre_gemma":"empirical","genre_scores_codex":[0.9042847,0.003103313,0.08274344,0.0002515375,0.0002537256,0.0003048946,0.0009549996,0.001322847,0.006780501],"genre_scores_gemma":[0.9261865,0.001078374,0.06973815,0.00007512555,0.00002014213,0.0001607684,0.0004013413,0.0001331318,0.002206548],"genre_candidate":"empirical","genre_consensus":"empirical","teacher_disagreement_score":0.001270876,"threshold_uncertainty_score":0.004532337,"prediction_status":"machine_predicted_unvalidated"},"machine_scores":{"provisional":true,"baseline":true,"maturity_gate_passed":false,"score_opus":0.01640912016127093,"score_gpt":0.2207040229327239,"score_spread":0.2042949027714529,"validation_status":"score_only:v0-immature-baseline","note":"Baseline scores from an immature model (maturity gate not passed). Scores rank; they never assert a category."}}